JPS6170930U - - Google Patents

Info

Publication number
JPS6170930U
JPS6170930U JP15547284U JP15547284U JPS6170930U JP S6170930 U JPS6170930 U JP S6170930U JP 15547284 U JP15547284 U JP 15547284U JP 15547284 U JP15547284 U JP 15547284U JP S6170930 U JPS6170930 U JP S6170930U
Authority
JP
Japan
Prior art keywords
elastic material
ion implantation
implantation apparatus
wafer
wafer holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15547284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15547284U priority Critical patent/JPS6170930U/ja
Publication of JPS6170930U publication Critical patent/JPS6170930U/ja
Pending legal-status Critical Current

Links

JP15547284U 1984-10-15 1984-10-15 Pending JPS6170930U (US07860544-20101228-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15547284U JPS6170930U (US07860544-20101228-C00003.png) 1984-10-15 1984-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15547284U JPS6170930U (US07860544-20101228-C00003.png) 1984-10-15 1984-10-15

Publications (1)

Publication Number Publication Date
JPS6170930U true JPS6170930U (US07860544-20101228-C00003.png) 1986-05-15

Family

ID=30713483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15547284U Pending JPS6170930U (US07860544-20101228-C00003.png) 1984-10-15 1984-10-15

Country Status (1)

Country Link
JP (1) JPS6170930U (US07860544-20101228-C00003.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS64635A (en) * 1987-06-22 1989-01-05 Toshiba Mach Co Ltd Sample setting device
JPS6471050A (en) * 1987-05-04 1989-03-16 Varian Associates Wafer holder

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6471050A (en) * 1987-05-04 1989-03-16 Varian Associates Wafer holder
JPS64635A (en) * 1987-06-22 1989-01-05 Toshiba Mach Co Ltd Sample setting device

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