JPS6170927U - - Google Patents

Info

Publication number
JPS6170927U
JPS6170927U JP15547984U JP15547984U JPS6170927U JP S6170927 U JPS6170927 U JP S6170927U JP 15547984 U JP15547984 U JP 15547984U JP 15547984 U JP15547984 U JP 15547984U JP S6170927 U JPS6170927 U JP S6170927U
Authority
JP
Japan
Prior art keywords
heat treatment
cylinder
semiconductor substrate
gas passage
core tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15547984U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15547984U priority Critical patent/JPS6170927U/ja
Publication of JPS6170927U publication Critical patent/JPS6170927U/ja
Pending legal-status Critical Current

Links

JP15547984U 1984-10-15 1984-10-15 Pending JPS6170927U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15547984U JPS6170927U (enrdf_load_stackoverflow) 1984-10-15 1984-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15547984U JPS6170927U (enrdf_load_stackoverflow) 1984-10-15 1984-10-15

Publications (1)

Publication Number Publication Date
JPS6170927U true JPS6170927U (enrdf_load_stackoverflow) 1986-05-15

Family

ID=30713490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15547984U Pending JPS6170927U (enrdf_load_stackoverflow) 1984-10-15 1984-10-15

Country Status (1)

Country Link
JP (1) JPS6170927U (enrdf_load_stackoverflow)

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