JPS6170449A - Gas detecting element - Google Patents

Gas detecting element

Info

Publication number
JPS6170449A
JPS6170449A JP59192339A JP19233984A JPS6170449A JP S6170449 A JPS6170449 A JP S6170449A JP 59192339 A JP59192339 A JP 59192339A JP 19233984 A JP19233984 A JP 19233984A JP S6170449 A JPS6170449 A JP S6170449A
Authority
JP
Japan
Prior art keywords
gas
sn
thin
film
detecting element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59192339A
Inventor
Yuji Matsumura
Masayuki Shiratori
Minoru Sunakawa
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP59192339A priority Critical patent/JPS6170449A/en
Publication of JPS6170449A publication Critical patent/JPS6170449A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material
    • G01N27/04Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Abstract

PURPOSE: To detect reducing gas with high sensitivity and good selectivity by providing a thin In-Sn-O film on an insulating substrate and providing further a catalyst layer such as Pd thereon thereby constituting a gas detecting element.
CONSTITUTION: A pair of electrodes 2 are provided on an insulating substrate 1 such as alumina. An org. soln. contg. indium octylate, etc. and tin octylate, etc. is coated thereon and is thermally decomposed to form a thin In-Sn-O film 3. The catalyst layer 4 deposited with at least one kind among Pt, Pd and Rh on Al2O3 is laminated thereon, by which the gas detecting element is obtd. The element is brought into contact with the reducing gas and the gas is detected from the change in the electric resistance. Since the thin In-Sn-O film is provided, the detection of the CO, CH4, C3H8, etc. which are the reducing gas with high sensitivity is made possible.
COPYRIGHT: (C)1986,JPO&Japio
JP59192339A 1984-09-13 1984-09-13 Gas detecting element Pending JPS6170449A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59192339A JPS6170449A (en) 1984-09-13 1984-09-13 Gas detecting element

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP59192339A JPS6170449A (en) 1984-09-13 1984-09-13 Gas detecting element
KR8506138A KR890000390B1 (en) 1984-09-13 1985-08-24 Gas detecting apparatus
GB08522434A GB2166549B (en) 1984-09-13 1985-09-10 Gas detecting elements and process for producing the same
CA000490569A CA1221736A (en) 1984-09-13 1985-09-12 Gas detecting elements and process for producing the same

Publications (1)

Publication Number Publication Date
JPS6170449A true JPS6170449A (en) 1986-04-11

Family

ID=16289632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59192339A Pending JPS6170449A (en) 1984-09-13 1984-09-13 Gas detecting element

Country Status (4)

Country Link
JP (1) JPS6170449A (en)
KR (1) KR890000390B1 (en)
CA (1) CA1221736A (en)
GB (1) GB2166549B (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61197551U (en) * 1985-05-30 1986-12-10
JPS6383650A (en) * 1986-09-29 1988-04-14 Toshiba Corp Gas sensor
JPH01118759A (en) * 1987-10-31 1989-05-11 Toshiba Corp Gas sensor
JPH0254157A (en) * 1988-08-18 1990-02-23 Toshiba Corp Gas sensor
JPH04152258A (en) * 1990-10-16 1992-05-26 Matsushita Electric Ind Co Ltd Ozone sensor
JP2013531250A (en) * 2010-07-13 2013-08-01 エバーハルト カール ウニヴェルジテート テュービンゲン Gas sensor and manufacturing method thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8804717D0 (en) * 1988-02-29 1988-03-30 Atomic Energy Authority Uk Gas sensing

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE788501A (en) * 1971-09-17 1973-01-02 Libbey Owens Ford Co Method for application of coatings of tin oxide on transparent substrates
US4030340A (en) * 1976-07-22 1977-06-21 General Monitors, Inc. Hydrogen gas detector
JPS6360339B2 (en) * 1977-01-31 1988-11-24
JPS5424096A (en) * 1977-07-26 1979-02-23 Fuji Electric Co Ltd Carbon monoxide detector
US4313338A (en) * 1978-08-18 1982-02-02 Matsushita Electric Industrial Co., Ltd. Gas sensing device
DE2942516C2 (en) * 1979-10-20 1982-11-11 Draegerwerk Ag, 2400 Luebeck, De
SE8105260L (en) * 1980-09-13 1982-03-14 Matsushita Electric Works Ltd Gas detector
AU558390B2 (en) * 1981-01-14 1987-01-29 Westinghouse Electric Corporation Thick film sensor for hydrogen and carbon monoxide

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61197551U (en) * 1985-05-30 1986-12-10
JPS6383650A (en) * 1986-09-29 1988-04-14 Toshiba Corp Gas sensor
JPH01118759A (en) * 1987-10-31 1989-05-11 Toshiba Corp Gas sensor
JPH0254157A (en) * 1988-08-18 1990-02-23 Toshiba Corp Gas sensor
JPH04152258A (en) * 1990-10-16 1992-05-26 Matsushita Electric Ind Co Ltd Ozone sensor
JP2013531250A (en) * 2010-07-13 2013-08-01 エバーハルト カール ウニヴェルジテート テュービンゲン Gas sensor and manufacturing method thereof

Also Published As

Publication number Publication date
GB2166549A (en) 1986-05-08
GB2166549B (en) 1988-11-02
GB8522434D0 (en) 1985-10-16
CA1221736A1 (en)
CA1221736A (en) 1987-05-12
KR860002716A (en) 1986-04-28
KR890000390B1 (en) 1989-03-16

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