JPS6170394U - - Google Patents

Info

Publication number

JPS6170394U

JPS6170394U JP15523184U JP15523184U JPS6170394U JP S6170394 U JPS6170394 U JP S6170394U JP 15523184 U JP15523184 U JP 15523184U JP 15523184 U JP15523184 U JP 15523184U JP S6170394 U JPS6170394 U JP S6170394U

Authority

JP

Japan

Prior art keywords

thick film

film heater

temperature detection

detection element

glass layer

Prior art date

1984-10-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 8
• 239000011521 glass Substances 0.000 claims description 5
• 239000000919 ceramic Substances 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 238000010586 diagram Methods 0.000 description 3
• 238000009792 diffusion process Methods 0.000 description 1

Cited By (3)