JPS6170268U - - Google Patents

Info

Publication number

JPS6170268U

JPS6170268U JP15434184U JP15434184U JPS6170268U JP S6170268 U JPS6170268 U JP S6170268U JP 15434184 U JP15434184 U JP 15434184U JP 15434184 U JP15434184 U JP 15434184U JP S6170268 U JPS6170268 U JP S6170268U

Authority

JP

Japan

Prior art keywords

laser beam

displacement

measured

forms

detection element

Prior art date

1984-10-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000006073 displacement reaction Methods 0.000 claims description 8
• 238000001514 detection method Methods 0.000 claims description 4
• 238000003384 imaging method Methods 0.000 claims description 2
• 238000010586 diagram Methods 0.000 description 2

Cited By (3)