JPS6169895U - - Google Patents

Info

Publication number
JPS6169895U
JPS6169895U JP15344884U JP15344884U JPS6169895U JP S6169895 U JPS6169895 U JP S6169895U JP 15344884 U JP15344884 U JP 15344884U JP 15344884 U JP15344884 U JP 15344884U JP S6169895 U JPS6169895 U JP S6169895U
Authority
JP
Japan
Prior art keywords
semiconductor devices
inclined chute
tube
process tube
recovery device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15344884U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15344884U priority Critical patent/JPS6169895U/ja
Publication of JPS6169895U publication Critical patent/JPS6169895U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Branching, Merging, And Special Transfer Between Conveyors (AREA)
JP15344884U 1984-10-11 1984-10-11 Pending JPS6169895U (US07922777-20110412-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15344884U JPS6169895U (US07922777-20110412-C00004.png) 1984-10-11 1984-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15344884U JPS6169895U (US07922777-20110412-C00004.png) 1984-10-11 1984-10-11

Publications (1)

Publication Number Publication Date
JPS6169895U true JPS6169895U (US07922777-20110412-C00004.png) 1986-05-13

Family

ID=30711467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15344884U Pending JPS6169895U (US07922777-20110412-C00004.png) 1984-10-11 1984-10-11

Country Status (1)

Country Link
JP (1) JPS6169895U (US07922777-20110412-C00004.png)

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