JPS6169138U - - Google Patents
Info
- Publication number
- JPS6169138U JPS6169138U JP15473884U JP15473884U JPS6169138U JP S6169138 U JPS6169138 U JP S6169138U JP 15473884 U JP15473884 U JP 15473884U JP 15473884 U JP15473884 U JP 15473884U JP S6169138 U JPS6169138 U JP S6169138U
- Authority
- JP
- Japan
- Prior art keywords
- helium
- inspected
- support plate
- helium leak
- elastic member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052734 helium Inorganic materials 0.000 claims description 7
- 239000001307 helium Substances 0.000 claims description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 7
- 238000007689 inspection Methods 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15473884U JPS6169138U (ko) | 1984-10-12 | 1984-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15473884U JPS6169138U (ko) | 1984-10-12 | 1984-10-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6169138U true JPS6169138U (ko) | 1986-05-12 |
Family
ID=30712728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15473884U Pending JPS6169138U (ko) | 1984-10-12 | 1984-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6169138U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180033579A (ko) * | 2015-08-31 | 2018-04-03 | 시마쯔에미트 가부시키가이샤 | 헬륨 리크 디텍터 |
-
1984
- 1984-10-12 JP JP15473884U patent/JPS6169138U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180033579A (ko) * | 2015-08-31 | 2018-04-03 | 시마쯔에미트 가부시키가이샤 | 헬륨 리크 디텍터 |
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