JPS6168327A - Recovering apparatus of gaseous uranium hexafluoride - Google Patents

Recovering apparatus of gaseous uranium hexafluoride

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Publication number
JPS6168327A
JPS6168327A JP19017884A JP19017884A JPS6168327A JP S6168327 A JPS6168327 A JP S6168327A JP 19017884 A JP19017884 A JP 19017884A JP 19017884 A JP19017884 A JP 19017884A JP S6168327 A JPS6168327 A JP S6168327A
Authority
JP
Japan
Prior art keywords
gas
pressure
gaseous
exhaust gas
recovery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19017884A
Other languages
Japanese (ja)
Inventor
Junichi Hirozawa
広沢 準一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP19017884A priority Critical patent/JPS6168327A/en
Publication of JPS6168327A publication Critical patent/JPS6168327A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To recover gaseous UF6, etc. with high efficiency using aq simplified apparatus by compressing gaseous UF6 then solidifying by cooling in a recovering vessel in a cooling tank, sucking the solidified product by controlling the pressure in the vessel and adsorbing gaseous UF6 and gaseous HF to each trap. CONSTITUTION:Gaseous UF6 discharged from a UF6 gas treating plant and compressed by a compressor 1 is introduced into an accumulator 20 having a closed cylindrical structure as recovering vessel provided in a cooling tank 5, and solidified by cooling. The pressure in the accumulator 20 is controlled through a pressure sensor 15, pressure controller 16, and a pressure control valve 18 so as not to liquefy accumulated gaseous HF, and gaseous HF accompanying a small amt. of UF6 is led to a UF6 adsorbing trap 11 packed with NaF pellets provided to a waste gas treating system 22 to adsorb UF6 sufficiently. The gaseous HF is then led to an HF adsorbing trap 12 packed with activated alumina pellets. where the gaseous HF is adsorbed and remaining air alone is sucked by a rotary pump 14 and discharged to the outside and treated as waste gas.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は六フッ化ウランガスがコンプレッサで胃圧され
てアキュムレータ等の密1:11容参::へ直接回収す
る六フッ化ウランガスの111収装置に関する。
[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a 111 collection device for uranium hexafluoride gas in which the uranium hexafluoride gas is gastrically compressed by a compressor and directly recovered into a 1:11 container such as an accumulator. Regarding.

〔発明の技術的背頃〕[Technical background of the invention]

六フッ化ウランガス(以下UF6ガスど記す)を大気圧
以下で取扱・うウランa″:、縮プラントにおいて、U
F6ガスを回収する装置としで、コンブレラ1すにより
()[6ガスを圧縮し、圧縮された(JF6を冷却した
LIFGシリンダへ3?入1ハ固化回収するシステムが
採用されている1、これ(よ、圧縮されたUF6ガスが
冷却されると気体から固体へ相変化する事を利用したし
のである、。
Uranium hexafluoride gas (hereinafter referred to as UF6 gas) is handled at below atmospheric pressure.
As a device for recovering F6 gas, a system is adopted in which the compressed (JF6) is solidified and recovered by compressing it through a conbrerator (1) and solidifying and recovering the compressed (JF6) gas into a cooled LIFG cylinder. (This is based on the fact that when compressed UF6 gas is cooled, it undergoes a phase change from gas to solid.)

第2図は従来のUF6ガスの回収装置の・「4成を承り
系統図である。
Figure 2 is a system diagram showing the four components of a conventional UF6 gas recovery device.

この図において、符号1はtJF6ガスを圧縮するコン
プレッサを示しており、このコンプレッサ1で圧縮され
たtJF6ガスは吐出側配管2からUF6シリンダ3に
接続配管4を介して送られる。
In this figure, reference numeral 1 indicates a compressor for compressing tJF6 gas, and the tJF6 gas compressed by this compressor 1 is sent from a discharge side pipe 2 to a UF6 cylinder 3 via a connecting pipe 4.

UF6シリンダ3は冷却槽5内に収納されて所定の温度
に維持される。接続配管4には圧力516と分岐配管7
が接続されており、分岐配管7には弁8が介在される。
The UF6 cylinder 3 is housed in a cooling tank 5 and maintained at a predetermined temperature. Connection pipe 4 has pressure 516 and branch pipe 7
is connected to the branch pipe 7, and a valve 8 is interposed in the branch pipe 7.

分岐配管7の下流側はコールドトラップ9.圧力調整弁
10、(J「6吸払トラツプ11、フッ化水素(HF 
)吸着1〜ラツプ12、圧力調整弁13およびロータリ
ポンプ14が順次接続されている。コールド1−ラップ
9と圧力調整弁10との間には圧力検出器15および圧
力rJJ整器16が、また1−IF吸吸着トララップ1
2圧力調整弁13との間には圧力検出器171I;よび
圧力調整器18がそれぞれ設りられており、各F「力調
整器16.18は圧力調整弁10,13の弁開度を調節
制御している。
The downstream side of the branch pipe 7 is a cold trap 9. Pressure regulating valve 10, (J"6 suction trap 11, hydrogen fluoride (HF)
) Adsorption 1 to lap 12, pressure regulating valve 13 and rotary pump 14 are connected in sequence. A pressure detector 15 and a pressure rJJ regulator 16 are installed between the cold 1-lap 9 and the pressure regulating valve 10;
A pressure detector 171I; and a pressure regulator 18 are provided between the two pressure regulating valves 13, and each F'force regulator 16.18 adjusts the valve opening degree of the pressure regulating valves 10 and 13. It's in control.

しかして、UF6シリンダ3は冷却槽5にJ:つて冷却
されており、UF6シリング3に導入されるU「 ガス
は冷却されて固化され、UF6シリシダ3内に回収され
る。しかしながら、使用されるtJF6シリンダ3はA
NS I規搭で規定されたボンベタイプのjJ F  
輸送容器であり、(j「6シリングにはLJF、、ガス
導入口が1り所;旧づられているだけである。
The UF6 cylinder 3 is cooled in the cooling tank 5, and the gas introduced into the UF6 cylinder 3 is cooled, solidified, and collected in the UF6 cylinder 3. tJF6 cylinder 3 is A
Cylinder type jJF specified by NS I regulations
It is a transport container, (j "6 shillings has one gas inlet; it is just an old spelling.

(前項技術の問題点〕 ところで、U「6ガスは、不純物としてl−I Fガス
を含んでおり、かつ、UF6取扱いプロレスが大気圧力
以下で操作される為、IJ F 6ガス回収系統内にリ
ークインした歩出の空気も不純物として存在する。した
がって、従来のUF6ガスの回収装置で、IJF6ガス
の回収を続けていくと、1−1Fガスおよび空気がUF
6シリンダ3内に蓄(ろされ、かつ、UF6シリンダ3
内の回収UF6fnも増加し、UF6シリンダ内気相部
の容積が減少する。
(Problems with the technology in the previous section) By the way, U6 gas contains l-IF gas as an impurity, and since the UF6 handling pro wrestling is operated at below atmospheric pressure, there is no gas in the IJF6 gas recovery system. Air that has leaked in also exists as an impurity. Therefore, when IJF6 gas is continued to be recovered using a conventional UF6 gas recovery device, 1-1F gas and air become UF6 gas.
6 cylinder 3 and UF6 cylinder 3
The recovered UF6fn within the cylinder also increases, and the volume of the gas phase within the UF6 cylinder decreases.

このため、回収圧力が次第に高くなる現象が発生し、コ
ンプレッサの回収効率7%低下する問題があった。
For this reason, a phenomenon occurred in which the recovery pressure gradually increased, resulting in a problem in which the recovery efficiency of the compressor decreased by 7%.

また、11Fガスは、一定の圧力を超えると液化する性
71を右しているため、圧力が高い所で回収操作を続け
ると回収U[6中に不純物として液化されたI−I F
が混入する。さらに、回収UF6が淵斬1ウランの場合
には回収UF6中の水M温度が決められた値以下になる
扛定められいる。このため従来のUF6がスの回収装置
では回収ガス圧力を圧力計6で監視し、UF6ガス回収
系統内の圧力が一定の値以上になると弁8を間き、回収
系統内のガスを排気し回収圧力を下げる操作を行なう必
要があった。しかし、弁8を聞き、ガスを排気り−る排
気操作時に回収づべぎIJF6ガスも同時にI/I−気
されてし11う問題点があり、かっこのUF6成分が多
く含まれる排気ガスを処理りる為コールド1〜ラツプ9
、UF6吸着トラップ11、HF吸着1゛ラツプ12お
よびロータリポンプ14と、各吸着トラップの圧力fj
J I2I+装置とから構成される排気ガス処理系が必
要であり、その分だ【プ排気ガス処理系のM4′?iが
複雑で高価なものとなっていた。
In addition, 11F gas has the property of liquefying when the pressure exceeds a certain level71, so if the recovery operation is continued in a place with high pressure, I-IF gas will be liquefied as an impurity in the recovered U[6].
is mixed in. Further, when the recovered UF6 is Fuchizaki 1 uranium, it is determined that the temperature of the water M in the recovered UF6 is equal to or lower than a predetermined value. For this reason, in the conventional UF6 gas recovery system, the recovered gas pressure is monitored with a pressure gauge 6, and when the pressure in the UF6 gas recovery system exceeds a certain value, the valve 8 is closed and the gas in the recovery system is exhausted. It was necessary to perform an operation to lower the recovery pressure. However, there is a problem in that during the exhaust operation to listen to valve 8 and exhaust the gas, the recovered IJF6 gas is also evacuated at the same time. Cold 1 to Lap 9 for processing
, UF6 adsorption trap 11, HF adsorption 1 lap 12 and rotary pump 14, and the pressure fj of each adsorption trap.
An exhaust gas treatment system consisting of a J I2I+ device is required, and that's it [M4' of the exhaust gas treatment system? i has become complicated and expensive.

(発明の目的) 本発明は上述した事情を考直してなされたものC、コン
プレッサで圧縮されたjJF6ガスを回収容器内に効率
的に回収させるとともに、回収容器内のHFガス等の不
純物(軽ガス成分)を排気づ。
(Objective of the Invention) The present invention has been made by reconsidering the above-mentioned circumstances, and is capable of efficiently recovering jJF6 gas compressed by a compressor into a recovery container, and also to remove impurities such as HF gas (light gas) in the recovery container. gas components).

る際、排気ガス中に含まれるtJF6ガス十を少なくし
、排気ガス処理系を構成を簡素化した六フッ化ウランガ
スの回収装置を(?洪することを目的とする。
The purpose is to reduce the amount of tJF6 gas contained in the exhaust gas and to develop a uranium hexafluoride gas recovery device with a simplified configuration of the exhaust gas treatment system.

〔発明の概要〕[Summary of the invention]

本発明は、上述した目的を構成するために、六フッ化ウ
ランガスの39人配管と↑1気ガス配管が0通する冷f
JJlりと、この冷却槽内に収納され上記ガス導入配管
と排気ガス配管とがそれぞれ6脱自在に接続される回収
容器ど、前記排気ガス配管に順次接続された六フッ化つ
ラン吸(”i l−ラップ、フッ化水素吸着トラップお
よび00′:ポンプからなる朗気ガス処理系と、この排
気ガス処理系の六フッ化つラン吸?、’f トラップお
よびQ圧ポンプの上流側にそ札ぞれ設けられた圧力調節
弁とを右し、上記圧力調節弁より回収容器の背側圧力を
調節制御したものである。
In order to achieve the above-mentioned object, the present invention has been developed to provide a cold f
A recovery container, which is housed in this cooling tank and is removably connected to the gas introduction pipe and the exhaust gas pipe, respectively, is connected to the exhaust gas pipe in sequence. i l-rap, hydrogen fluoride adsorption trap, and 00':pump, and the exhaust gas treatment system has a hexafluoride suction system, 'f trap, and upstream of the Q pressure pump. The pressure control valves provided on each side are arranged on the right side, and the pressure on the back side of the collection container is controlled by the pressure control valves.

ぞし゛C1本発明ではアキュムレータ等の同収容器の背
圧をコンl−ロール1゛ることにJ:・)で常時1−I
FFガスどの督ガス成分である排気ガスを排気処理する
ことが可能であり、II+気ガスに含まれてIJ1気さ
れるUF6ガス墳を減らすことが可口しどなる。
In the present invention, the back pressure of the same container such as an accumulator is controlled by 1-roll 1.
It is possible to exhaust the exhaust gas, which is a gas component of the FF gas, and it is possible to reduce the amount of UF6 gas contained in the II+ gas and removed from the IJ1 gas.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明に係るUF6ガスの回収装置の一実施例を
第1図に基いて説明する。
An embodiment of the UF6 gas recovery apparatus according to the present invention will be described below with reference to FIG.

第1図は本発明のUF6ガス回収装置の構成を系統図で
示している。なお、第1図中、第2図と同一の部分には
同一符号を付し、重複する部分の説明を省略する。
FIG. 1 shows a system diagram of the configuration of the UF6 gas recovery apparatus of the present invention. In FIG. 1, the same parts as in FIG. 2 are denoted by the same reference numerals, and the explanation of the overlapping parts will be omitted.

范1図において、符号1はガス分Ntカスケードから排
出される製品()F6ガスを圧縮するコンプレン1ノ゛
を示し、このコンブレラ1f1のガス吐出部は、冷却槽
5内を書いて延びるガス3rン人配管4を介して回収容
器どしてのアキュムレータ20に接続される。アキ」、
ムレータ20は密閉された筒状構造に形成され、冷却槽
5内に取出し自在に収容される。アー1.ユムレータ2
0の〜・側上部にガス39人配管4ど接続する()「6
ガス3rI入020 F、lが、ぞの他側上部に排気ガ
ス配管21に接続されるガス排気口20bが形成される
11両配管4.21とアキュムレータ20の接続は冷7
Jl ’M 5内でフランジ等により看悦自在に行なわ
れる。nt気ガス配管21は冷却槽5を口いて外部に灰
び、での延長部にHFガス等の排気ガスを処理する排気
ガス処理系22が設けられる。
In Figure 1, reference numeral 1 indicates a compressor 1 which compresses the product ()F6 gas discharged from the gas Nt cascade, and the gas discharge part of this compressor 1f1 is connected to the gas 3r extending inside the cooling tank 5. It is connected to an accumulator 20, such as a collection container, via a human pipe 4. Aki”,
The mullet 20 is formed into a sealed cylindrical structure and is housed in the cooling tank 5 so as to be freely taken out. A1. Yumuleta 2
Connect the gas pipe 4 to the upper part of ~・ side of 0 () "6
Gas 3rI in 020
This can be done in Jl'M5 using flanges etc. in a way that can be easily viewed. The nt air gas pipe 21 connects to the cooling tank 5 and is ashes to the outside, and an exhaust gas treatment system 22 for treating exhaust gas such as HF gas is provided at the extension thereof.

排気ガス処理系22は排気ガス配管21にUF6吸着1
−ラップ11 、HF吸着トラップ12および負圧ポン
プとしてのロータリポンプ14を順次接続することによ
り構成され、tJF6吸着1−ラップ11およびロータ
リポンプ74の上流側に圧力調節弁10および13がそ
れぞれ介装される。
The exhaust gas treatment system 22 adsorbs UF6 to the exhaust gas pipe 21.
- Constructed by sequentially connecting a wrap 11, an HF adsorption trap 12, and a rotary pump 14 as a negative pressure pump, and pressure regulating valves 10 and 13 are installed on the upstream side of the tJF6 adsorption 1-lap 11 and rotary pump 74, respectively. be done.

圧力調節弁10.13は圧力調節計16.18により作
動制御され、弁開度が調節される。圧力調節計16.1
8には圧力検出Z15.17からの検出信号が入力され
る。、各圧力検出器15.17は圧力調節弁10.13
の上流側に設置される。
The pressure regulating valve 10.13 is operated and controlled by a pressure regulator 16.18, and the valve opening degree is adjusted. Pressure regulator 16.1
A detection signal from pressure detection Z15.17 is input to 8. , each pressure detector 15.17 has a pressure regulating valve 10.13.
installed on the upstream side of the

一方の圧力調節弁10【よアキュムレータ20のテテ側
圧力を調節制御しており、池方の圧力調節弁13は吸着
トラップ11.12の捕!L効率を高めるために設置さ
れる。圧力、J¥節弁13の設定1直は、一方の圧力調
節弁10の設定値(圧力)の約半分であり、このように
圧力調節弁13を作動制御することにより、圧力調節弁
13をクリティカル条1′1て使用することが可能とな
り、その下流側の圧力変り1の影響を上流側にりえるこ
とを防1[゛できる。
One pressure regulating valve 10 regulates the pressure on the side of the accumulator 20, and the pressure regulating valve 13 on the other hand controls the pressure of the adsorption traps 11 and 12. L installed to increase efficiency. The setting value (pressure) of the pressure regulating valve 13 for one shift is about half of the setting value (pressure) of one of the pressure regulating valves 10, and by controlling the operation of the pressure regulating valve 13 in this way, the pressure regulating valve 13 can be It becomes possible to use the critical line 1'1, and it is possible to prevent the influence of the pressure change 1 on the downstream side from reaching the upstream side.

次に、UF6ガスの回収菰;6の作用について説明りる
Next, the action of the UF6 gas recovery unit 6 will be explained.

11Fの蒸気圧曲線は、Pll「を1−1Fガス圧力(
81m1−1)、tを1−IF濡度(°C)としたとさ
、ワ ” ’ 10PIF = 8 、 38036−1952 、’  55 /
’ (335。
The vapor pressure curve for 11F is calculated by converting Pll' to 1-1F gas pressure (
81m1-1), and if t is 1-IF wetness (°C), then wa'' 10PIF = 8, 38036-1952, '55/
'(335.

52 + t )で表わされる。52 + t).

しかして、UF6ガス処理プラントのプロセスから排出
されるUF6ガスをコンプレッサ1で圧縮し、圧縮され
たU「6ガスを冷ムロ槽5内のアキュムータ20に案内
して、冷I、rl固(ヒさせる。その場合において、ア
キュムレータ20内へ回収されたUF6量が少ない時点
では、不純物である11「ガス分圧も十分低く、か゛つ
ア’1− Jムレータ20内の回収圧力も低いため、圧
力調節弁10は開している。回収運転を継続していくう
らに、I−I Fガス等がUF6ガス回収系統内に次第
に27積し回収系統内圧力もL胃し、アキュムレータ2
0に導入されたH Fガスが液化り−る恐れが生じてく
る。
The UF6 gas discharged from the process of the UF6 gas processing plant is compressed by the compressor 1, and the compressed U6 gas is guided to the accumulator 20 in the cold mulch tank 5 to solidify the cold I, RL, In this case, when the amount of UF6 recovered into the accumulator 20 is small, the partial pressure of the impurity UF6 gas is sufficiently low, and the recovery pressure in the UF6 accumulator 20 is also low, so the pressure is low. The control valve 10 is open.As the recovery operation continues, I-IF gas, etc. gradually accumulates in the UF6 gas recovery system, and the pressure in the recovery system decreases, causing the accumulator 2
There is a possibility that the HF gas introduced into the reactor will liquefy.

しかし、この場合には、冷却(15の冷却温度を前記H
「の蒸気曲線の式に当てはめ、この式にり求まるl−I
 Fガスの然気圧力値以下になるJ:うに、アキュムレ
ータ20内圧力(71側圧力)が圧力調節弁1oにより
制御される3、これににす、1−IFFガス液化を有効
的にかつ確実に防1ヒすることができる。
However, in this case, the cooling (cooling temperature of 15
Applying it to the steam curve equation of
J: The internal pressure of the accumulator 20 (71 side pressure) is controlled by the pressure control valve 1o. Can defend against 1 hit.

また、アキュムレータ20内を1月二〇ガスと少品のH
Fガスが通過りる際、Lj r二。ガスt、L IIと
んどが固化されるため、排気)IX中の()「6分圧は
、(、ロエ冷IA槽のン晶度で示2\れるUF6の藩気
圧となる1、これは、10℃〜20″Cの冷加:扁度で
比較すると1−IFの蒸気圧の約1/10程ビ[であり
、アキ−しムレ〜り20は]−ルドトラップの機能を右
する。したがって、UF6ガス回収部から排気されるU
IT6ガスはHFガスに同伴されることが少なく、排気
されるUF6ガスはわずか/f申となる。
In addition, the inside of the accumulator 20 is filled with gas and a small amount of H.
When F gas passes through, Lj r2. Since most of the gas t, L II is solidified, the ()6 partial pressure in the exhaust) This is about 1/10 of the vapor pressure of 1-IF when compared with cooling temperature of 10℃ to 20''C, and the cold trap function is Therefore, the U exhausted from the UF6 gas recovery section
IT6 gas is rarely entrained in HF gas, and only UF6 gas is exhausted.

よって、このtJF6ガス回収部から排気されるガスを
処理する装置に、−]−ルドトラップ笠の1本皿(よ不
要と<r 8 o IJj気される(J「6ガスが少な
いため、UF6ガスの処理は充填塔にフッ化す1ヘリウ
ム(NaF)ペレットを充1眞したUF6吸看トラップ
11で充分に行なうことができ、11Fガスの処理は充
填塔に活性アルミナ(γ・Δ)、03)ベレットを充填
した1−1F吸?′11−ラップ12で行ない17る。
Therefore, in the equipment that processes the gas exhausted from this tJF6 gas recovery section, I feel that it is unnecessary to use one plate of the -]-rud trap shade. Gas treatment can be sufficiently carried out using a UF6 suction trap 11 in which a packed tower is filled with helium (NaF) pellets. ) Carry out 1-1F suction ?'11-wrap 12 filled with pellets17.

このため、ロータリポンプ14からは、11気ガス処理
系22に流入した空電のみを吸引し、外部に排気処理す
ることができる。
Therefore, from the rotary pump 14, only the static electricity that has flowed into the 11-gas processing system 22 can be sucked and exhausted to the outside.

〔発明の効果〕〔Effect of the invention〕

以上に述べたように本発明に係るU「6ガスの回収装置
は、冷1.l]槽内に収容されに回収容器に排気ガス配
管を接続し、この1月気ガス配V、に六フッ化ウラン吸
着1〜ラップ、フッ化水毒吸61−ラップおよび負圧ポ
ンプを順次jp IXした排気ガス姐理系を接続し、ご
のIA気ガス処処理の六フッ化ウラン吸着トラップ(υ
J、び負圧ポンプの上流側に月−力調節弁をそれぞれ設
け、上記圧力調節弁により回収容器の背側圧力を調節す
ることにより、回収容器内でl−I Fガスの液化を確
実に防市するとともに、回収容器から排気される1−1
[ガス簀の不純物に同伴されて排出されるUF6ガスn
1を少なくすることができ、しかも、回収容器がコール
ドl−ラップの機能を有″!Vるので、排気ガス処理系
にコールドトラップを使用する必要が/(、その分だけ
、排気ガス処理系を簡素化、安価にラツ造することがで
きる。排気ガス処理系に]−ルド1へラップを設(」な
くても、tJF6万スやHFガスの回収を効率よく行な
うことができる。
As described above, the U6 gas recovery device according to the present invention is housed in a cold 1.L tank and connects the exhaust gas piping to the recovery container. Connect the uranium fluoride adsorption 1-lap, fluoride water poison absorption 61-lap and negative pressure pump in sequence to the exhaust gas system, and install the uranium hexafluoride adsorption trap (υ
A pressure control valve is provided on the upstream side of the J and negative pressure pumps, and the pressure on the back side of the recovery container is adjusted by the pressure control valve, thereby ensuring the liquefaction of the l-IF gas within the recovery container. 1-1 is removed from the city and exhausted from the collection container.
[UF6 gas emitted along with impurities in the gas tank n
In addition, since the recovery container has a cold wrap function, it is not necessary to use a cold trap in the exhaust gas treatment system. can be simplified and constructed at low cost. Even without installing a wrap around the exhaust gas treatment system, it is possible to efficiently recover tJF60,000 gas and HF gas.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明に係る六フッ化ウランガスの回収装置
の一実施例を概略的に示す系統図、第2図は従来の六フ
ッ化ウランガスの回収装置を概略的に示す系統図である
。。 1・・・コンブレラ1す、3・・・UF6シリンダ、5
・・・冷7J]槽、9・・・]−ルド(−ラップ、10
.13・・・圧ノフ調節弁、11・・・tJF6@着1
〜ラップ、12・・・;−1「吸着トラップ、14・・
・ロータリポンプ、20・・・アキコムレータ、22・
・・11気ガス叫理系、。
FIG. 1 is a system diagram schematically showing an embodiment of a uranium hexafluoride gas recovery device according to the present invention, and FIG. 2 is a system diagram schematically showing a conventional uranium hexafluoride gas recovery device. . . 1... Combrera 1, 3... UF6 cylinder, 5
...cold 7J] tank, 9...]-rudo (-wrap, 10
.. 13...Pressure nof control valve, 11...tJF6@arrival 1
~Wrap, 12...;-1 "Adsorption trap, 14...
・Rotary pump, 20...Akicomulator, 22・
...11 ki gas cry science system.

Claims (1)

【特許請求の範囲】 1、六フッ化ウランガスの導入配管と排気ガス配管が貫
通する冷却槽と、この冷却槽内に収納され上記ガス導入
配管と排気ガス配管とがそれぞれ着脱自在に接続される
回収容器と、前記排気ガス配管に順次接続された六フッ
化ウラン吸着トラップ、フッ化水素吸着トラップおよび
負圧ポンプからなる排気ガス処理系と、この排気ガス処
理系の六フッ化ウラン吸着トラップおよび負圧ポンプの
上流側にそれぞれ設けられた圧力調節弁とを有し、上記
圧力調節弁により回収容器の背側圧力を調節制御したこ
とを特徴とする六フッ化ウランガスの回収装置。 2、回収容器はアキュムレータ等の筒状密閉容器であり
、上記回収容器の一側にガス導入配管を接続するガス導
入口が、その他側に排気ガス配管を接続するガス排出口
が形成された特許請求の範囲第1項に記載の六フッ化ウ
ランガスの回収装置。 3、圧力調節弁はこの圧力調節弁の上流側排気ガス配管
に設けられた圧力検出器からの検出信号を入力する圧力
調節計により作動制御される特許請求の範囲第1項に記
載の六フッ化ウランガスの回収装置。
[Scope of Claims] 1. A cooling tank through which a uranium hexafluoride gas introduction pipe and an exhaust gas pipe pass, and a cooling tank in which the gas introduction pipe and the exhaust gas pipe are detachably connected to each other by being housed in the cooling tank. a recovery container, an exhaust gas treatment system consisting of a uranium hexafluoride adsorption trap, a hydrogen fluoride adsorption trap, and a negative pressure pump connected in sequence to the exhaust gas piping; a uranium hexafluoride adsorption trap of the exhaust gas treatment system; 1. A recovery device for uranium hexafluoride gas, comprising a pressure control valve provided upstream of a negative pressure pump, and wherein the pressure control valve adjusts and controls the pressure on the back side of a recovery container. 2. The recovery container is a cylindrical sealed container such as an accumulator, and the recovery container has a gas inlet for connecting a gas introduction pipe on one side and a gas outlet for connecting an exhaust gas pipe on the other side. A recovery device for uranium hexafluoride gas according to claim 1. 3. The six-foot valve according to claim 1, wherein the pressure regulating valve is operated and controlled by a pressure regulator that inputs a detection signal from a pressure detector provided in the exhaust gas piping upstream of the pressure regulating valve. Uranium oxide gas recovery equipment.
JP19017884A 1984-09-11 1984-09-11 Recovering apparatus of gaseous uranium hexafluoride Pending JPS6168327A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19017884A JPS6168327A (en) 1984-09-11 1984-09-11 Recovering apparatus of gaseous uranium hexafluoride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19017884A JPS6168327A (en) 1984-09-11 1984-09-11 Recovering apparatus of gaseous uranium hexafluoride

Publications (1)

Publication Number Publication Date
JPS6168327A true JPS6168327A (en) 1986-04-08

Family

ID=16253741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19017884A Pending JPS6168327A (en) 1984-09-11 1984-09-11 Recovering apparatus of gaseous uranium hexafluoride

Country Status (1)

Country Link
JP (1) JPS6168327A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110031909A (en) * 2008-06-05 2011-03-29 헤래우스 크바르츠글라스 게엠베하 & 컴파니 케이지 Method and apparatus for producing a crucible of quartz glass

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110031909A (en) * 2008-06-05 2011-03-29 헤래우스 크바르츠글라스 게엠베하 & 컴파니 케이지 Method and apparatus for producing a crucible of quartz glass
JP2011521882A (en) * 2008-06-05 2011-07-28 ヘレウス・クアルツグラース・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング・ウント・コンパニー・コマンディット・ゲゼルシャフト Method and apparatus for producing quartz glass crucible

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