JPS6168258U - - Google Patents
Info
- Publication number
- JPS6168258U JPS6168258U JP1984153395U JP15339584U JPS6168258U JP S6168258 U JPS6168258 U JP S6168258U JP 1984153395 U JP1984153395 U JP 1984153395U JP 15339584 U JP15339584 U JP 15339584U JP S6168258 U JPS6168258 U JP S6168258U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- microns
- thickness
- utility
- glass substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000005357 flat glass Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984153395U JPS6168258U (zh) | 1984-10-11 | 1984-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984153395U JPS6168258U (zh) | 1984-10-11 | 1984-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6168258U true JPS6168258U (zh) | 1986-05-10 |
Family
ID=30711417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984153395U Pending JPS6168258U (zh) | 1984-10-11 | 1984-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6168258U (zh) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5876833A (ja) * | 1981-11-02 | 1983-05-10 | Konishiroku Photo Ind Co Ltd | 画像形成材料 |
| JPS58152241A (ja) * | 1982-03-08 | 1983-09-09 | Toshiba Corp | 高精度マスクの製造方法 |
-
1984
- 1984-10-11 JP JP1984153395U patent/JPS6168258U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5876833A (ja) * | 1981-11-02 | 1983-05-10 | Konishiroku Photo Ind Co Ltd | 画像形成材料 |
| JPS58152241A (ja) * | 1982-03-08 | 1983-09-09 | Toshiba Corp | 高精度マスクの製造方法 |