JPS6168005U - - Google Patents
Info
- Publication number
- JPS6168005U JPS6168005U JP15403184U JP15403184U JPS6168005U JP S6168005 U JPS6168005 U JP S6168005U JP 15403184 U JP15403184 U JP 15403184U JP 15403184 U JP15403184 U JP 15403184U JP S6168005 U JPS6168005 U JP S6168005U
- Authority
- JP
- Japan
- Prior art keywords
- enclosure
- clean
- air
- front side
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15403184U JPH0237764Y2 (es) | 1984-10-11 | 1984-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15403184U JPH0237764Y2 (es) | 1984-10-11 | 1984-10-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6168005U true JPS6168005U (es) | 1986-05-09 |
| JPH0237764Y2 JPH0237764Y2 (es) | 1990-10-12 |
Family
ID=30712025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15403184U Expired JPH0237764Y2 (es) | 1984-10-11 | 1984-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0237764Y2 (es) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62200610U (es) * | 1986-06-10 | 1987-12-21 | ||
| JPS6348707U (es) * | 1986-09-17 | 1988-04-02 | ||
| JPS6348706U (es) * | 1986-09-17 | 1988-04-02 |
-
1984
- 1984-10-11 JP JP15403184U patent/JPH0237764Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62200610U (es) * | 1986-06-10 | 1987-12-21 | ||
| JPS6348707U (es) * | 1986-09-17 | 1988-04-02 | ||
| JPS6348706U (es) * | 1986-09-17 | 1988-04-02 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0237764Y2 (es) | 1990-10-12 |