JPS6167869U - - Google Patents

Info

Publication number
JPS6167869U
JPS6167869U JP1984150932U JP15093284U JPS6167869U JP S6167869 U JPS6167869 U JP S6167869U JP 1984150932 U JP1984150932 U JP 1984150932U JP 15093284 U JP15093284 U JP 15093284U JP S6167869 U JPS6167869 U JP S6167869U
Authority
JP
Japan
Prior art keywords
liquid
perforated plate
section
supply
outer edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984150932U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984150932U priority Critical patent/JPS6167869U/ja
Publication of JPS6167869U publication Critical patent/JPS6167869U/ja
Pending legal-status Critical Current

Links

Classifications

    • H10W72/0113—

Landscapes

  • Coating Apparatus (AREA)
  • Die Bonding (AREA)
JP1984150932U 1984-10-05 1984-10-05 Pending JPS6167869U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984150932U JPS6167869U (OSRAM) 1984-10-05 1984-10-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984150932U JPS6167869U (OSRAM) 1984-10-05 1984-10-05

Publications (1)

Publication Number Publication Date
JPS6167869U true JPS6167869U (OSRAM) 1986-05-09

Family

ID=30709062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984150932U Pending JPS6167869U (OSRAM) 1984-10-05 1984-10-05

Country Status (1)

Country Link
JP (1) JPS6167869U (OSRAM)

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