JPS6166962U - - Google Patents
Info
- Publication number
- JPS6166962U JPS6166962U JP15187984U JP15187984U JPS6166962U JP S6166962 U JPS6166962 U JP S6166962U JP 15187984 U JP15187984 U JP 15187984U JP 15187984 U JP15187984 U JP 15187984U JP S6166962 U JPS6166962 U JP S6166962U
- Authority
- JP
- Japan
- Prior art keywords
- groove
- silicon
- diameter
- metal film
- receiving element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15187984U JPH079391Y2 (ja) | 1984-10-08 | 1984-10-08 | 半導体受光素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15187984U JPH079391Y2 (ja) | 1984-10-08 | 1984-10-08 | 半導体受光素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6166962U true JPS6166962U (hu) | 1986-05-08 |
| JPH079391Y2 JPH079391Y2 (ja) | 1995-03-06 |
Family
ID=30709975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15187984U Expired - Lifetime JPH079391Y2 (ja) | 1984-10-08 | 1984-10-08 | 半導体受光素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079391Y2 (hu) |
-
1984
- 1984-10-08 JP JP15187984U patent/JPH079391Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH079391Y2 (ja) | 1995-03-06 |