JPS6166937U - - Google Patents
Info
- Publication number
- JPS6166937U JPS6166937U JP15115684U JP15115684U JPS6166937U JP S6166937 U JPS6166937 U JP S6166937U JP 15115684 U JP15115684 U JP 15115684U JP 15115684 U JP15115684 U JP 15115684U JP S6166937 U JPS6166937 U JP S6166937U
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- wafer
- drying apparatus
- convection
- water droplet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000001704 evaporation Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 12
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15115684U JPS6166937U (en, 2012) | 1984-10-08 | 1984-10-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15115684U JPS6166937U (en, 2012) | 1984-10-08 | 1984-10-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6166937U true JPS6166937U (en, 2012) | 1986-05-08 |
Family
ID=30709282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15115684U Pending JPS6166937U (en, 2012) | 1984-10-08 | 1984-10-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166937U (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63105329U (en, 2012) * | 1986-12-25 | 1988-07-08 | ||
| JPH01231329A (ja) * | 1988-03-11 | 1989-09-14 | Shin Etsu Handotai Co Ltd | 蒸気洗浄装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5988827A (ja) * | 1982-11-12 | 1984-05-22 | Hitachi Ltd | 蒸気乾燥装置 |
| JPS59138232A (ja) * | 1983-01-29 | 1984-08-08 | Oogawara Kakoki Kk | 粉体塗料等の整粒装置 |
-
1984
- 1984-10-08 JP JP15115684U patent/JPS6166937U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5988827A (ja) * | 1982-11-12 | 1984-05-22 | Hitachi Ltd | 蒸気乾燥装置 |
| JPS59138232A (ja) * | 1983-01-29 | 1984-08-08 | Oogawara Kakoki Kk | 粉体塗料等の整粒装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63105329U (en, 2012) * | 1986-12-25 | 1988-07-08 | ||
| JPH01231329A (ja) * | 1988-03-11 | 1989-09-14 | Shin Etsu Handotai Co Ltd | 蒸気洗浄装置 |
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