JPS6165456U - - Google Patents

Info

Publication number
JPS6165456U
JPS6165456U JP1984149862U JP14986284U JPS6165456U JP S6165456 U JPS6165456 U JP S6165456U JP 1984149862 U JP1984149862 U JP 1984149862U JP 14986284 U JP14986284 U JP 14986284U JP S6165456 U JPS6165456 U JP S6165456U
Authority
JP
Japan
Prior art keywords
vertex
photomask substrate
utility
scope
rectangular shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984149862U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984149862U priority Critical patent/JPS6165456U/ja
Publication of JPS6165456U publication Critical patent/JPS6165456U/ja
Pending legal-status Critical Current

Links

JP1984149862U 1984-10-02 1984-10-02 Pending JPS6165456U (bs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984149862U JPS6165456U (bs) 1984-10-02 1984-10-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984149862U JPS6165456U (bs) 1984-10-02 1984-10-02

Publications (1)

Publication Number Publication Date
JPS6165456U true JPS6165456U (bs) 1986-05-06

Family

ID=30708029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984149862U Pending JPS6165456U (bs) 1984-10-02 1984-10-02

Country Status (1)

Country Link
JP (1) JPS6165456U (bs)

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