JPS6164164U - - Google Patents

Info

Publication number
JPS6164164U
JPS6164164U JP15010384U JP15010384U JPS6164164U JP S6164164 U JPS6164164 U JP S6164164U JP 15010384 U JP15010384 U JP 15010384U JP 15010384 U JP15010384 U JP 15010384U JP S6164164 U JPS6164164 U JP S6164164U
Authority
JP
Japan
Prior art keywords
cooling pipe
slide boat
liquid phase
epitaxial growth
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15010384U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15010384U priority Critical patent/JPS6164164U/ja
Publication of JPS6164164U publication Critical patent/JPS6164164U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP15010384U 1984-10-03 1984-10-03 Pending JPS6164164U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15010384U JPS6164164U (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15010384U JPS6164164U (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Publications (1)

Publication Number Publication Date
JPS6164164U true JPS6164164U (enrdf_load_stackoverflow) 1986-05-01

Family

ID=30708258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15010384U Pending JPS6164164U (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Country Status (1)

Country Link
JP (1) JPS6164164U (enrdf_load_stackoverflow)

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