JPS6164164U - - Google Patents
Info
- Publication number
- JPS6164164U JPS6164164U JP15010384U JP15010384U JPS6164164U JP S6164164 U JPS6164164 U JP S6164164U JP 15010384 U JP15010384 U JP 15010384U JP 15010384 U JP15010384 U JP 15010384U JP S6164164 U JPS6164164 U JP S6164164U
- Authority
- JP
- Japan
- Prior art keywords
- cooling pipe
- slide boat
- liquid phase
- epitaxial growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 4
- 239000007791 liquid phase Substances 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000002826 coolant Substances 0.000 claims 2
- 230000001737 promoting effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15010384U JPS6164164U (OSRAM) | 1984-10-03 | 1984-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15010384U JPS6164164U (OSRAM) | 1984-10-03 | 1984-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6164164U true JPS6164164U (OSRAM) | 1986-05-01 |
Family
ID=30708258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15010384U Pending JPS6164164U (OSRAM) | 1984-10-03 | 1984-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6164164U (OSRAM) |
-
1984
- 1984-10-03 JP JP15010384U patent/JPS6164164U/ja active Pending