JPS6164160U - - Google Patents
Info
- Publication number
- JPS6164160U JPS6164160U JP14754384U JP14754384U JPS6164160U JP S6164160 U JPS6164160 U JP S6164160U JP 14754384 U JP14754384 U JP 14754384U JP 14754384 U JP14754384 U JP 14754384U JP S6164160 U JPS6164160 U JP S6164160U
- Authority
- JP
- Japan
- Prior art keywords
- cover
- vapor deposition
- boat
- boat body
- accommodates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14754384U JPH0210118Y2 (es) | 1984-09-29 | 1984-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14754384U JPH0210118Y2 (es) | 1984-09-29 | 1984-09-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6164160U true JPS6164160U (es) | 1986-05-01 |
| JPH0210118Y2 JPH0210118Y2 (es) | 1990-03-13 |
Family
ID=30705768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14754384U Expired JPH0210118Y2 (es) | 1984-09-29 | 1984-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0210118Y2 (es) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005029895A (ja) * | 2003-07-04 | 2005-02-03 | Agfa Gevaert Nv | 蒸着装置 |
| JP2012184453A (ja) * | 2011-03-03 | 2012-09-27 | Seiko Epson Corp | 蒸着装置 |
-
1984
- 1984-09-29 JP JP14754384U patent/JPH0210118Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005029895A (ja) * | 2003-07-04 | 2005-02-03 | Agfa Gevaert Nv | 蒸着装置 |
| JP2012184453A (ja) * | 2011-03-03 | 2012-09-27 | Seiko Epson Corp | 蒸着装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0210118Y2 (es) | 1990-03-13 |