JPS6163831U - - Google Patents
Info
- Publication number
- JPS6163831U JPS6163831U JP14734484U JP14734484U JPS6163831U JP S6163831 U JPS6163831 U JP S6163831U JP 14734484 U JP14734484 U JP 14734484U JP 14734484 U JP14734484 U JP 14734484U JP S6163831 U JPS6163831 U JP S6163831U
- Authority
- JP
- Japan
- Prior art keywords
- thick substrate
- mask
- holder
- substrate
- front surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004381 surface treatment Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 5
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14734484U JPH019152Y2 (en:Method) | 1984-10-01 | 1984-10-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14734484U JPH019152Y2 (en:Method) | 1984-10-01 | 1984-10-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6163831U true JPS6163831U (en:Method) | 1986-04-30 |
| JPH019152Y2 JPH019152Y2 (en:Method) | 1989-03-13 |
Family
ID=30705573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14734484U Expired JPH019152Y2 (en:Method) | 1984-10-01 | 1984-10-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH019152Y2 (en:Method) |
-
1984
- 1984-10-01 JP JP14734484U patent/JPH019152Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH019152Y2 (en:Method) | 1989-03-13 |