JPS6163167U - - Google Patents

Info

Publication number
JPS6163167U
JPS6163167U JP14837984U JP14837984U JPS6163167U JP S6163167 U JPS6163167 U JP S6163167U JP 14837984 U JP14837984 U JP 14837984U JP 14837984 U JP14837984 U JP 14837984U JP S6163167 U JPS6163167 U JP S6163167U
Authority
JP
Japan
Prior art keywords
electrode plate
fixed
electrode
attached
plate support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14837984U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14837984U priority Critical patent/JPS6163167U/ja
Publication of JPS6163167U publication Critical patent/JPS6163167U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP14837984U 1984-09-29 1984-09-29 Pending JPS6163167U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14837984U JPS6163167U (enrdf_load_stackoverflow) 1984-09-29 1984-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14837984U JPS6163167U (enrdf_load_stackoverflow) 1984-09-29 1984-09-29

Publications (1)

Publication Number Publication Date
JPS6163167U true JPS6163167U (enrdf_load_stackoverflow) 1986-04-28

Family

ID=30706594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14837984U Pending JPS6163167U (enrdf_load_stackoverflow) 1984-09-29 1984-09-29

Country Status (1)

Country Link
JP (1) JPS6163167U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001133478A (ja) * 1999-09-10 2001-05-18 Stmicroelectronics Srl 容量性慣性センサの位置オフセットを補正するための方法ならびに容量性慣性センサ
JP2010038903A (ja) * 2008-07-31 2010-02-18 Honeywell Internatl Inc 閉ループ線形駆動加速度計を用いて面外線形加速度を検出するためのシステムおよび方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5067173A (enrdf_load_stackoverflow) * 1973-10-15 1975-06-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5067173A (enrdf_load_stackoverflow) * 1973-10-15 1975-06-05

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001133478A (ja) * 1999-09-10 2001-05-18 Stmicroelectronics Srl 容量性慣性センサの位置オフセットを補正するための方法ならびに容量性慣性センサ
JP2010038903A (ja) * 2008-07-31 2010-02-18 Honeywell Internatl Inc 閉ループ線形駆動加速度計を用いて面外線形加速度を検出するためのシステムおよび方法

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