JPS6161848U - - Google Patents

Info

Publication number
JPS6161848U
JPS6161848U JP14539984U JP14539984U JPS6161848U JP S6161848 U JPS6161848 U JP S6161848U JP 14539984 U JP14539984 U JP 14539984U JP 14539984 U JP14539984 U JP 14539984U JP S6161848 U JPS6161848 U JP S6161848U
Authority
JP
Japan
Prior art keywords
gauge
diaphragm
pressure sensor
gauge resistors
semiconductor pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14539984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0319232Y2 (US20030199744A1-20031023-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984145399U priority Critical patent/JPH0319232Y2/ja
Publication of JPS6161848U publication Critical patent/JPS6161848U/ja
Application granted granted Critical
Publication of JPH0319232Y2 publication Critical patent/JPH0319232Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP1984145399U 1984-09-26 1984-09-26 Expired JPH0319232Y2 (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984145399U JPH0319232Y2 (US20030199744A1-20031023-C00003.png) 1984-09-26 1984-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984145399U JPH0319232Y2 (US20030199744A1-20031023-C00003.png) 1984-09-26 1984-09-26

Publications (2)

Publication Number Publication Date
JPS6161848U true JPS6161848U (US20030199744A1-20031023-C00003.png) 1986-04-25
JPH0319232Y2 JPH0319232Y2 (US20030199744A1-20031023-C00003.png) 1991-04-23

Family

ID=30703653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984145399U Expired JPH0319232Y2 (US20030199744A1-20031023-C00003.png) 1984-09-26 1984-09-26

Country Status (1)

Country Link
JP (1) JPH0319232Y2 (US20030199744A1-20031023-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010032389A (ja) * 2008-07-29 2010-02-12 Dainippon Printing Co Ltd 物理量センサ及びその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4994573U (US20030199744A1-20031023-C00003.png) * 1972-12-08 1974-08-15
JPS5468170A (en) * 1977-11-11 1979-06-01 Hitachi Ltd Fine pattern element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4994573U (US20030199744A1-20031023-C00003.png) * 1972-12-08 1974-08-15
JPS5468170A (en) * 1977-11-11 1979-06-01 Hitachi Ltd Fine pattern element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010032389A (ja) * 2008-07-29 2010-02-12 Dainippon Printing Co Ltd 物理量センサ及びその製造方法

Also Published As

Publication number Publication date
JPH0319232Y2 (US20030199744A1-20031023-C00003.png) 1991-04-23

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