JPS6161428A - Driveing method of x-y table - Google Patents

Abstract

PURPOSE:To enable an X-Y table to automatically drive to its moving destina tion position only within the movable extent by a method wherein the movable region to be allowed to the X-Y table is set in advance and when the moving destination position is outside the movable region, the drive of the X-Y table to its moving destination position is stopped in advance. CONSTITUTION:The set result of an actual moving destination position setter 23 and the movable region Z of an X-Y table 17, which is set in advance in a movable region setter 25, are compared by a controller 24. By this compared result, when the actual moving destination position of the X-Y table 17 is within the movable region Z, which is allowed the X-Y table 17, the X-Y table 17 is made to drive to its actual moving destination position by an X-Y table driving part 26, while when the actual moving destination position is outside the movable region Z, the drive of the X-Y table 17 to its actual moving destination position is stopped in advance and the decision of this stop is informed the operator by an alarm 27.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an XY table driving method suitable for use in semiconductor manufacturing equipment.

[Prior Art] In pellet pounding devices that mount pellets on a lead frame, wire pounding devices that bond between lead posts of lead frames and pads of pellets using wires such as gold wire, pellets are held by suction. Guide the wire to a predetermined bonding position between the lead post and pad by positioning the collet at a predetermined mounting position on the lead frame or displacing the capillary holding the wire by a predetermined amount with respect to the lead frame and pellet pair. XY to enable
A table is used.

Here, the XY table has its destination position set in advance according to work data such as the pellet mounting position and the wire pounding position, and is driven toward the set single or multiple destination positions. It is considered possible.

On the other hand, the XY table must be driven within a movable range that does not substantially interfere with peripheral devices such as lead frame feeding devices arranged around it.

[Problems to be Solved by the Invention] However, the conventional XY table does not have a function to determine whether the destination position is within the movable area. When pounding and sawing the wire at multiple bonding positions, the XY at the nth pounding
If the destination position of the table exceeds the movable area, the drive of the XY table may stop due to the activation of the limit sensor during the nth pounding, or the XY table may interfere with peripheral equipment due to its inertia. There is a risk of the device moving even further and damaging the device. In addition, if the drive of the XY table stops during the nth pounding operation due to the operation of the limit sensor, the product may become defective or
There are inconveniences such as the need to reset the operating conditions of the device.

An object of the present invention is to enable an XY table to be automatically driven to a pre-required destination position only within a movable range.

[Means for Solving the Problems] In order to achieve the above object, the present invention provides an XY table that automatically drives an XY table to a pre-required destination position.
In the table driving method, a movable area allowed for the XY table is determined in advance, and it is determined whether a movement destination position required for the XY table is inside or outside the movable area,
When the destination position is within the movable area, drive the XY table to the destination position, and when the destination position is outside the movable area, stop driving the XY table to the destination position in advance. This is how it was done.

[Operation] Therefore, according to the present invention, it is determined whether the movement destination position required for the XY table in advance is inside or outside the movable area, and it is determined whether or not the XY table can be driven. of.

Only within the movable range, it is possible to automatically drive to a previously requested destination position.

[Example] FIG. 1 is a control circuit diagram showing a control device used for implementing the present invention, and FIG. 2 is a plan view schematically showing the main parts of a wire bonding device to which the present invention is applied.

The wire bonding device shown in FIG.
The lead frame 13 on which the pellet (pellet) 12 is mounted is positioned at a predetermined position above the lead frame 13, and a wire 16 such as a gold wire can be bonded between the lead boss 14 provided on the lead frame 13 and the pad 15 provided on the pellet 12. It is said that 17 is an XY table, and capillary 18
can be supported. The capillary 18 is connected to the wire 1
6 is held, by driving the XY table 17,
It is relatively displaced by a predetermined amount with respect to the lead frame 13 and the pellet 12, making it possible to guide the wire 16 to a predetermined bonding position between the lead post 14 and the pad 15. In addition, Z in FIG. 2 is the XY table 17.
When the bonding position of the lead boss (14) and pad 15 is within this range, the XY
The wires 16 can be reliably pumped to their pumping positions via the capillary 18 without the table 17 interfering with peripheral equipment or activating a limit sensor.

Further, A and B are two positional deviation detection marks provided on the lead frame 13, and the positions of these positional deviation detection marks A and B and the reference points a and b predetermined corresponding to them are By detecting deviations in the X and Y directions from the reference position of the lead frame 13, the
Misalignment in the direction, Y direction, and rotational direction (ΔX, ΔY
, Δ0) can be detected.

However, in this embodiment, each pounding position (x61
,Yol)-(X67L, Y(77L-) are set in the reference destination position setter 21. On the other hand, the positional deviation detector 22 detects the positional deviation detection marks A, 1 provided on the lead frame 13. % position and the relative positional relationship between the reference points a and b and the reference positions, the deviations (ΔX, ΔY, Δ0) of the lead frame 13 from the normal position on the guide rail 11 are detected.

Reference numeral 23 denotes an actual destination position setting device, which sets x relative to the lead frame 13 on the guide rail 11 based on the setting results of the reference destination position setting device 21 and the detection results of the positional deviation detector 22.
Y, the actual movement destination position of the table 17 is set. That is, when the lead frame 13 on the guide rail 11 is deviated from the normal position (ΔX, ΔY, Δθ).

The actual destination position setting device 23 is the reference destination position setting device 21.
Each bonding position of the lead frame 13 set to CXox, To-t)-CXoyt-, Yol
D and the detection results of the positional deviation detector 22 (ΔX, ΔY,
Based on the actual movement destination position of the XY table 17, each regular pounding position (
Xl, Yi) −(X7L, YN), Xi = f CXAD, Y, j, , Δ
X, Δy, Δθ)・(1) Yi = g CX1o
, Yb01ΔX, Δy, Δθ)・Calculate and set according to (2).

24 is a controller, and the controller 24 compares the setting result of the actual destination position setting device 23 with the movable region Z of the XY table 17 predetermined in the movable region setting device 25.

Based on this comparison result, the actual movement destination position CX0L, Yol
) is within the movable region Z, the XY table 17 is driven to its actual movement destination position by the XY table drive unit 26,
On the other hand, when the actual destination position (X(+7L, YO?L)) is outside the movable area Z, the driving of the XY table 17 to that actual destination position is stopped in advance, and the operator is notified of this cancellation by the alarm 27. Report to.

Note that the comparison between the setting result of the actual destination position setting device 23 by the controller 24 and the setting result of the movable area setting device 25 is performed at the start of bonding for all the bonding positions of the lead frame 13 and the bellet 12. At that point, it may be determined whether or not the XY table 17 can be driven for all the bonding positions. Alternatively, the above comparison may be made immediately before each bonding position of the lead frame 13 and pellet 12, and the It is also possible to determine whether or not the XY table 17 can be driven for each pounding position immediately beforehand.

Two examples of cases in which the drive of the XY table 17 is stopped according to the present invention will be described below.

In the first example, as shown in FIG. 2, even though the detection marks A and B are not deviated from the reference points a and b, the actual destination position setter 23 sets the bonding point, that is, the actual destination. Position (x, L-1, Yort-1), (X oyt, Y
oc) is out of the movable area Z. That is, in this first example, the reference destination position setting device 2
This means that the set value was already outside the movable area Z at the stage of setting it to 1, and the Kono set value (Xoyt-1
, Yoft-1), CX07L, Yoyt,) so that they are within the movable area Z, or (Xoyt-1
, YOa-t'), (Xo7L, Y, , L), switch from automatic operation to manual operation and set the point within the movable area Z [point (Xt)7>-t in Fig. 2
.

Y, Xρ, (x5, Yo')] Align the gear pillar 18 and pound it manually.

In the second example, as shown in FIGS. 3 and 4, the detection mark A
, B and the reference points a and b, the reference destination is set so that all the pounding points, that is, the actual destination positions set in the actual destination position setting device 23 are within the movable area Z. The position was set (Fig. 3), but because the lead frame 13 shifted (ΔX, ΔY, Δθ) from the normal position (in Fig. 4, the lead frame 13 shifted to the right from the normal position). ), and as a result, the actual destination position - (X, 24, YfL-t), (x, 7L
, Y7L) is out of the movable area Z. That is, in this second example, the reference destination position within the movable movement area Z is set e in the reference destination position setting device 21', so that the positional deviation of the lead frame 13 is corrected as shown in FIG. In the 0 state, wires can be bonded to all bonding points. However, since there is a positional deviation in the lead frame 13, the actual bonding point, that is, the actual movement destination position (X,,Yi)...(x7L
-/, %-f), (X7'L, Yz) +7
) The middle part (Xa-t, Y*-r) and (xL, Y9) are outside the movable area Z. In this case, switch from automatic operation to manual operation and select the point [
Points (Xq-r, YfL-1), (X
p-, Yyl) ] Ni* + Hira! Align J18 and pound it manually.

That is, according to the above embodiment, the XY table 17 is
Only within the movable range Z, it is possible to automatically drive to a previously requested destination position. Therefore, the XY table 17 does not interfere with peripheral equipment and damage the equipment or produce defective products.
The table 17 is stopped by the operation of the limit sensor,
There is no problem such as having to reset the operating conditions of the device.

In the above embodiment, if the lead bosses 14 of the lead frame 13 are not present at all positions surrounding the entire circumference of the pellet 12, each pounding position set for each pad 15 of the pellet 12 is also table 1
It goes without saying that this should be selected as the destination position to be compared with the movable area Z of No. 7.

Further, although the above embodiments have been described with reference to the case where the present invention is applied to a wire bonding device, the present invention can be widely applied to other semiconductor manufacturing devices such as a pellet bonding device.

[Effects of the Invention] As described above, the present invention provides an XY table driving method for automatically driving an XY table to a pre-required movement destination position by predetermining the allowable movable area of the XY table and It is determined whether the movement destination position required for the table is inside or outside the movable area, and when the movement destination position is within the movement area, the XY table is driven to the movement destination position, and the movement destination is When the position is outside the movable range, the drive of the XY table to the destination position is stopped in advance.Therefore, the XY table is moved only within the movable range to the previously requested destination position. It becomes possible to drive automatically.

[Brief explanation of the drawing]

Fig. 1 is a control circuit diagram showing a control device used to implement the present invention, Fig. 2 is a plan view schematically showing a wire bonding device to which the present invention is applied, and Fig. 3 is a reference movement of an XY table. FIG. 4 is a plan view showing the relationship between the actual destination position and the movable area of the XY table. 17... XY table, 21... Reference destination position setter, 23... Actual destination position setter, 24... Controller, 25... Movable area setter, 26... XY Table drive unit, Z... movable area. Agent Patent Attorney Osamu Shiokawa Figure 1

Claims (1)

[Claims] (1) In an XY table driving method that automatically drives an XY table to a previously requested movement destination position,
A movable area allowed for the table is determined in advance, and it is determined whether the destination position required for the XY table is inside or outside the movable area, and when the destination position is within the movable area, the XY table is moved. A method for driving an XY table, characterized in that when the XY table is driven to the destination position and the destination position is outside the movable area, driving of the XY table to the destination position is stopped in advance.