JPS6161069U - - Google Patents
Info
- Publication number
- JPS6161069U JPS6161069U JP14219584U JP14219584U JPS6161069U JP S6161069 U JPS6161069 U JP S6161069U JP 14219584 U JP14219584 U JP 14219584U JP 14219584 U JP14219584 U JP 14219584U JP S6161069 U JPS6161069 U JP S6161069U
- Authority
- JP
- Japan
- Prior art keywords
- coated
- rotating head
- supported
- coating liquid
- spin coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14219584U JPS6161069U (en, 2012) | 1984-09-21 | 1984-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14219584U JPS6161069U (en, 2012) | 1984-09-21 | 1984-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6161069U true JPS6161069U (en, 2012) | 1986-04-24 |
Family
ID=30700523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14219584U Pending JPS6161069U (en, 2012) | 1984-09-21 | 1984-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6161069U (en, 2012) |
-
1984
- 1984-09-21 JP JP14219584U patent/JPS6161069U/ja active Pending
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