JPS6161016U - - Google Patents
Info
- Publication number
- JPS6161016U JPS6161016U JP14696684U JP14696684U JPS6161016U JP S6161016 U JPS6161016 U JP S6161016U JP 14696684 U JP14696684 U JP 14696684U JP 14696684 U JP14696684 U JP 14696684U JP S6161016 U JPS6161016 U JP S6161016U
- Authority
- JP
- Japan
- Prior art keywords
- gas processing
- gas
- suction port
- exhaust port
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14696684U JPS6161016U (no) | 1984-09-27 | 1984-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14696684U JPS6161016U (no) | 1984-09-27 | 1984-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6161016U true JPS6161016U (no) | 1986-04-24 |
Family
ID=30705204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14696684U Pending JPS6161016U (no) | 1984-09-27 | 1984-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6161016U (no) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61167921U (no) * | 1985-04-08 | 1986-10-18 | ||
| JPS63291624A (ja) * | 1987-05-23 | 1988-11-29 | Showa Denko Kk | ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5023347B1 (no) * | 1970-12-24 | 1975-08-07 |
-
1984
- 1984-09-27 JP JP14696684U patent/JPS6161016U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5023347B1 (no) * | 1970-12-24 | 1975-08-07 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61167921U (no) * | 1985-04-08 | 1986-10-18 | ||
| JPS63291624A (ja) * | 1987-05-23 | 1988-11-29 | Showa Denko Kk | ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法 |