JPS61601B2 - - Google Patents

Info

Publication number
JPS61601B2
JPS61601B2 JP53108741A JP10874178A JPS61601B2 JP S61601 B2 JPS61601 B2 JP S61601B2 JP 53108741 A JP53108741 A JP 53108741A JP 10874178 A JP10874178 A JP 10874178A JP S61601 B2 JPS61601 B2 JP S61601B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53108741A
Other languages
Japanese (ja)
Other versions
JPS5537429A (en
Inventor
Seiji Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP10874178A priority Critical patent/JPS5537429A/ja
Publication of JPS5537429A publication Critical patent/JPS5537429A/ja
Publication of JPS61601B2 publication Critical patent/JPS61601B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Optical Filters (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
JP10874178A 1978-09-04 1978-09-04 Production of optical thin film Granted JPS5537429A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10874178A JPS5537429A (en) 1978-09-04 1978-09-04 Production of optical thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10874178A JPS5537429A (en) 1978-09-04 1978-09-04 Production of optical thin film

Publications (2)

Publication Number Publication Date
JPS5537429A JPS5537429A (en) 1980-03-15
JPS61601B2 true JPS61601B2 (enrdf_load_stackoverflow) 1986-01-09

Family

ID=14492335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10874178A Granted JPS5537429A (en) 1978-09-04 1978-09-04 Production of optical thin film

Country Status (1)

Country Link
JP (1) JPS5537429A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62129601U (enrdf_load_stackoverflow) * 1986-02-05 1987-08-17

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6273202A (ja) * 1985-09-27 1987-04-03 Hamamatsu Photonics Kk 光学薄膜の製造方法
JPH0679090B2 (ja) * 1987-06-30 1994-10-05 東芝硝子株式会社 多層膜反射鏡の製造方法
US5046920A (en) * 1989-02-23 1991-09-10 Fuji Electric Co., Ltd. Bearing cooling system in horizontal shaft water turbine generator
JP2618516B2 (ja) * 1990-04-18 1997-06-11 シャープ株式会社 薄膜ｅｌ素子の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62129601U (enrdf_load_stackoverflow) * 1986-02-05 1987-08-17

Also Published As

Publication number Publication date
JPS5537429A (en) 1980-03-15

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