JPS6159662U - - Google Patents

Info

Publication number
JPS6159662U
JPS6159662U JP14232584U JP14232584U JPS6159662U JP S6159662 U JPS6159662 U JP S6159662U JP 14232584 U JP14232584 U JP 14232584U JP 14232584 U JP14232584 U JP 14232584U JP S6159662 U JPS6159662 U JP S6159662U
Authority
JP
Japan
Prior art keywords
electrode
sealed
sealing material
vacuum chamber
circulation space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14232584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0329319Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984142325U priority Critical patent/JPH0329319Y2/ja
Publication of JPS6159662U publication Critical patent/JPS6159662U/ja
Application granted granted Critical
Publication of JPH0329319Y2 publication Critical patent/JPH0329319Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP1984142325U 1984-09-21 1984-09-21 Expired JPH0329319Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984142325U JPH0329319Y2 (enrdf_load_stackoverflow) 1984-09-21 1984-09-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984142325U JPH0329319Y2 (enrdf_load_stackoverflow) 1984-09-21 1984-09-21

Publications (2)

Publication Number Publication Date
JPS6159662U true JPS6159662U (enrdf_load_stackoverflow) 1986-04-22
JPH0329319Y2 JPH0329319Y2 (enrdf_load_stackoverflow) 1991-06-21

Family

ID=30700649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984142325U Expired JPH0329319Y2 (enrdf_load_stackoverflow) 1984-09-21 1984-09-21

Country Status (1)

Country Link
JP (1) JPH0329319Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4896236U (enrdf_load_stackoverflow) * 1972-02-21 1973-11-15
JPS5812267U (ja) * 1981-07-14 1983-01-26 株式会社リコー 真空蒸着装置における支持体

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4896236U (enrdf_load_stackoverflow) * 1972-02-21 1973-11-15
JPS5812267U (ja) * 1981-07-14 1983-01-26 株式会社リコー 真空蒸着装置における支持体

Also Published As

Publication number Publication date
JPH0329319Y2 (enrdf_load_stackoverflow) 1991-06-21

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