JPS6159662U - - Google Patents
Info
- Publication number
- JPS6159662U JPS6159662U JP14232584U JP14232584U JPS6159662U JP S6159662 U JPS6159662 U JP S6159662U JP 14232584 U JP14232584 U JP 14232584U JP 14232584 U JP14232584 U JP 14232584U JP S6159662 U JPS6159662 U JP S6159662U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- sealed
- sealing material
- vacuum chamber
- circulation space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 2
- 239000003566 sealing material Substances 0.000 claims 2
- 238000007789 sealing Methods 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984142325U JPH0329319Y2 (cg-RX-API-DMAC7.html) | 1984-09-21 | 1984-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984142325U JPH0329319Y2 (cg-RX-API-DMAC7.html) | 1984-09-21 | 1984-09-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6159662U true JPS6159662U (cg-RX-API-DMAC7.html) | 1986-04-22 |
| JPH0329319Y2 JPH0329319Y2 (cg-RX-API-DMAC7.html) | 1991-06-21 |
Family
ID=30700649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984142325U Expired JPH0329319Y2 (cg-RX-API-DMAC7.html) | 1984-09-21 | 1984-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0329319Y2 (cg-RX-API-DMAC7.html) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4896236U (cg-RX-API-DMAC7.html) * | 1972-02-21 | 1973-11-15 | ||
| JPS5812267U (ja) * | 1981-07-14 | 1983-01-26 | 株式会社リコー | 真空蒸着装置における支持体 |
-
1984
- 1984-09-21 JP JP1984142325U patent/JPH0329319Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4896236U (cg-RX-API-DMAC7.html) * | 1972-02-21 | 1973-11-15 | ||
| JPS5812267U (ja) * | 1981-07-14 | 1983-01-26 | 株式会社リコー | 真空蒸着装置における支持体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0329319Y2 (cg-RX-API-DMAC7.html) | 1991-06-21 |