JPS6159341U - - Google Patents
Info
- Publication number
- JPS6159341U JPS6159341U JP1984143506U JP14350684U JPS6159341U JP S6159341 U JPS6159341 U JP S6159341U JP 1984143506 U JP1984143506 U JP 1984143506U JP 14350684 U JP14350684 U JP 14350684U JP S6159341 U JPS6159341 U JP S6159341U
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen
- gas
- furnace core
- core tube
- water vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984143506U JPH0442916Y2 (enExample) | 1984-09-25 | 1984-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984143506U JPH0442916Y2 (enExample) | 1984-09-25 | 1984-09-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6159341U true JPS6159341U (enExample) | 1986-04-21 |
| JPH0442916Y2 JPH0442916Y2 (enExample) | 1992-10-12 |
Family
ID=30701798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984143506U Expired JPH0442916Y2 (enExample) | 1984-09-25 | 1984-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0442916Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58116738A (ja) * | 1981-12-29 | 1983-07-12 | Oki Electric Ind Co Ltd | 半導体ウエハの熱処理装置 |
-
1984
- 1984-09-25 JP JP1984143506U patent/JPH0442916Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58116738A (ja) * | 1981-12-29 | 1983-07-12 | Oki Electric Ind Co Ltd | 半導体ウエハの熱処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0442916Y2 (enExample) | 1992-10-12 |