JPS6159341U - - Google Patents
Info
- Publication number
- JPS6159341U JPS6159341U JP14350684U JP14350684U JPS6159341U JP S6159341 U JPS6159341 U JP S6159341U JP 14350684 U JP14350684 U JP 14350684U JP 14350684 U JP14350684 U JP 14350684U JP S6159341 U JPS6159341 U JP S6159341U
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen
- gas
- furnace core
- core tube
- water vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 2
- 229910001882 dioxygen Inorganic materials 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 238000002485 combustion reaction Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984143506U JPH0442916Y2 (cg-RX-API-DMAC7.html) | 1984-09-25 | 1984-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984143506U JPH0442916Y2 (cg-RX-API-DMAC7.html) | 1984-09-25 | 1984-09-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6159341U true JPS6159341U (cg-RX-API-DMAC7.html) | 1986-04-21 |
| JPH0442916Y2 JPH0442916Y2 (cg-RX-API-DMAC7.html) | 1992-10-12 |
Family
ID=30701798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984143506U Expired JPH0442916Y2 (cg-RX-API-DMAC7.html) | 1984-09-25 | 1984-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0442916Y2 (cg-RX-API-DMAC7.html) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58116738A (ja) * | 1981-12-29 | 1983-07-12 | Oki Electric Ind Co Ltd | 半導体ウエハの熱処理装置 |
-
1984
- 1984-09-25 JP JP1984143506U patent/JPH0442916Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58116738A (ja) * | 1981-12-29 | 1983-07-12 | Oki Electric Ind Co Ltd | 半導体ウエハの熱処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0442916Y2 (cg-RX-API-DMAC7.html) | 1992-10-12 |