JPS6159340U - - Google Patents
Info
- Publication number
- JPS6159340U JPS6159340U JP14350984U JP14350984U JPS6159340U JP S6159340 U JPS6159340 U JP S6159340U JP 14350984 U JP14350984 U JP 14350984U JP 14350984 U JP14350984 U JP 14350984U JP S6159340 U JPS6159340 U JP S6159340U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- processing
- processing tank
- main body
- side wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012545 processing Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000005406 washing Methods 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 238000012993 chemical processing Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14350984U JPS6159340U (cg-RX-API-DMAC7.html) | 1984-09-25 | 1984-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14350984U JPS6159340U (cg-RX-API-DMAC7.html) | 1984-09-25 | 1984-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6159340U true JPS6159340U (cg-RX-API-DMAC7.html) | 1986-04-21 |
Family
ID=30701801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14350984U Pending JPS6159340U (cg-RX-API-DMAC7.html) | 1984-09-25 | 1984-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6159340U (cg-RX-API-DMAC7.html) |
-
1984
- 1984-09-25 JP JP14350984U patent/JPS6159340U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6159340U (cg-RX-API-DMAC7.html) | ||
| JPS58179319A (ja) | 液位検知装置 | |
| GB2112775B (en) | Concentration of organic chemicals from dilute aqueous solutions | |
| JPS6418186U (cg-RX-API-DMAC7.html) | ||
| JPS5443469A (en) | Manufacture of semiconductor device | |
| JPS639287U (cg-RX-API-DMAC7.html) | ||
| JPH0390436U (cg-RX-API-DMAC7.html) | ||
| JP2977790B2 (ja) | 半導体ウエーハ等用処理装置 | |
| JP2000124293A (ja) | ウェハ洗浄処理槽のウェハ検知装置 | |
| JPS61206853U (cg-RX-API-DMAC7.html) | ||
| JPS5866327U (ja) | 水位検知装置 | |
| JPS62163067U (cg-RX-API-DMAC7.html) | ||
| JPS61197992U (cg-RX-API-DMAC7.html) | ||
| JPS61170494U (cg-RX-API-DMAC7.html) | ||
| JPS6223584U (cg-RX-API-DMAC7.html) | ||
| JPS6094196U (ja) | 洗濯機 | |
| JPS6332689U (cg-RX-API-DMAC7.html) | ||
| JPH0330427U (cg-RX-API-DMAC7.html) | ||
| JPS6240830U (cg-RX-API-DMAC7.html) | ||
| JPS6210438U (cg-RX-API-DMAC7.html) | ||
| JPH02115612U (cg-RX-API-DMAC7.html) | ||
| JPS63127126U (cg-RX-API-DMAC7.html) | ||
| JPS6144520U (ja) | 液位検出装置 | |
| JPS57147986A (en) | Drainage device of small size vessel | |
| JPH01102730U (cg-RX-API-DMAC7.html) |