JPS6158990U - - Google Patents
Info
- Publication number
- JPS6158990U JPS6158990U JP14199784U JP14199784U JPS6158990U JP S6158990 U JPS6158990 U JP S6158990U JP 14199784 U JP14199784 U JP 14199784U JP 14199784 U JP14199784 U JP 14199784U JP S6158990 U JPS6158990 U JP S6158990U
- Authority
- JP
- Japan
- Prior art keywords
- levers
- pins
- substrate
- stage
- slide plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009966 trimming Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000000034 method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Description
第１図は従来の真空吸着方式による載物台の斜
視図、第２図は本考案の実施例による載物台の側
面図、第３図は同じく本考案に係る載物台の平面
図、第４図は本考案に係る載物台の移動ピンの押
し付け機構部分を示す平面図である。
２…トリミング基板、８…真空吸着用パツト、
９…直進駆動体、１０ａ，１０ｂ，１０ｃ…位置
決め用固定ピン、１１ａ，１１ｂ…移動ピン、１
３…載物板、１５…スライド板、１６…載物板受
け、１８…支柱、１９，２０，２１，２２…レバ
ー、１９ｃ，２１ａ，２２ｂ…レバー支点、１９
ａ，２２ａ…ピン、２３ａ，２３ｂ，２３ｃ…ば
ね。
FIG. 1 is a perspective view of a stage using a conventional vacuum suction method, FIG. 2 is a side view of a stage according to an embodiment of the present invention, and FIG. 3 is a plan view of a stage also according to the present invention. FIG. 4 is a plan view showing the pressing mechanism for the moving pin of the stage according to the present invention. 2...Trimming board, 8...Vacuum adsorption part,
9...Linear drive body, 10a, 10b, 10c... Fixed pin for positioning, 11a, 11b... Moving pin, 1
3... Loading plate, 15... Slide plate, 16... Loading plate holder, 18... Support column, 19, 20, 21, 22... Lever, 19c, 21a, 22b... Lever fulcrum, 19
a, 22a...pin, 23a, 23b, 23c...spring.
Claims (1)
線上にない少なくとも３個の位置決め用固定ピン
と、前記基板の他の隣接二辺を前記固定ピンへ向
つて押し付ける２個の移動ピンとを有する載物台
において、前記移動ピンを各々保持したレバーと
、前記レバーと接触可能なスライド板とを有し、
前記スライド板の押動により、前記レバーが互に
時間差をもつて回動され、これによつて前記２個
の移動ピンがそれぞれ時間差をもつて前記基板に
対する押し付けおよび開離の動作を行うことを特
徴とするレーザトリミング装置用載物台。 A stage having at least three fixed pins for positioning that are not in a straight line so as to contact two adjacent sides of a trimming substrate, and two movable pins that press the other two adjacent sides of the substrate toward the fixed pins. , comprising levers each holding the movable pins and a slide plate that can come into contact with the levers,
By pushing the slide plate, the levers are rotated with a time difference, so that the two movable pins are pressed against and separated from the substrate with a time difference, respectively. Features a stage for laser trimming equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14199784U JPS6158990U (en) | 1984-09-19 | 1984-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14199784U JPS6158990U (en) | 1984-09-19 | 1984-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6158990U true JPS6158990U (en) | 1986-04-21 |
Family
ID=30700328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14199784U Pending JPS6158990U (en) | 1984-09-19 | 1984-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6158990U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH034392U (en) * | 1989-06-05 | 1991-01-17 |
-
1984
- 1984-09-19 JP JP14199784U patent/JPS6158990U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH034392U (en) * | 1989-06-05 | 1991-01-17 |
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