JPS615806Y2 - - Google Patents

Info

Publication number
JPS615806Y2
JPS615806Y2 JP1971780U JP1971780U JPS615806Y2 JP S615806 Y2 JPS615806 Y2 JP S615806Y2 JP 1971780 U JP1971780 U JP 1971780U JP 1971780 U JP1971780 U JP 1971780U JP S615806 Y2 JPS615806 Y2 JP S615806Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1971780U
Other languages
Japanese (ja)
Other versions
JPS56123552U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1971780U priority Critical patent/JPS615806Y2/ja
Publication of JPS56123552U publication Critical patent/JPS56123552U/ja
Application granted granted Critical
Publication of JPS615806Y2 publication Critical patent/JPS615806Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP1971780U 1980-02-20 1980-02-20 Expired JPS615806Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1971780U JPS615806Y2 (enExample) 1980-02-20 1980-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1971780U JPS615806Y2 (enExample) 1980-02-20 1980-02-20

Publications (2)

Publication Number Publication Date
JPS56123552U JPS56123552U (enExample) 1981-09-19
JPS615806Y2 true JPS615806Y2 (enExample) 1986-02-21

Family

ID=29615961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1971780U Expired JPS615806Y2 (enExample) 1980-02-20 1980-02-20

Country Status (1)

Country Link
JP (1) JPS615806Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6027141A (ja) * 1983-07-25 1985-02-12 Ushio Inc ウエハ−のセツト機構

Also Published As

Publication number Publication date
JPS56123552U (enExample) 1981-09-19

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