JPS615806Y2 - - Google Patents

Info

Publication number
JPS615806Y2
JPS615806Y2 JP1971780U JP1971780U JPS615806Y2 JP S615806 Y2 JPS615806 Y2 JP S615806Y2 JP 1971780 U JP1971780 U JP 1971780U JP 1971780 U JP1971780 U JP 1971780U JP S615806 Y2 JPS615806 Y2 JP S615806Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1971780U
Other languages
Japanese (ja)
Other versions
JPS56123552U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1971780U priority Critical patent/JPS615806Y2/ja
Publication of JPS56123552U publication Critical patent/JPS56123552U/ja
Application granted granted Critical
Publication of JPS615806Y2 publication Critical patent/JPS615806Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP1971780U 1980-02-20 1980-02-20 Expired JPS615806Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1971780U JPS615806Y2 (enrdf_load_stackoverflow) 1980-02-20 1980-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1971780U JPS615806Y2 (enrdf_load_stackoverflow) 1980-02-20 1980-02-20

Publications (2)

Publication Number Publication Date
JPS56123552U JPS56123552U (enrdf_load_stackoverflow) 1981-09-19
JPS615806Y2 true JPS615806Y2 (enrdf_load_stackoverflow) 1986-02-21

Family

ID=29615961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1971780U Expired JPS615806Y2 (enrdf_load_stackoverflow) 1980-02-20 1980-02-20

Country Status (1)

Country Link
JP (1) JPS615806Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6027141A (ja) * 1983-07-25 1985-02-12 Ushio Inc ウエハ−のセツト機構

Also Published As

Publication number Publication date
JPS56123552U (enrdf_load_stackoverflow) 1981-09-19

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