JPS6157516U - - Google Patents
Info
- Publication number
- JPS6157516U JPS6157516U JP14238284U JP14238284U JPS6157516U JP S6157516 U JPS6157516 U JP S6157516U JP 14238284 U JP14238284 U JP 14238284U JP 14238284 U JP14238284 U JP 14238284U JP S6157516 U JPS6157516 U JP S6157516U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- heater
- plasma cvd
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000005266 casting Methods 0.000 claims description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 2
- 229910001369 Brass Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 239000010951 brass Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14238284U JPS6157516U (zh) | 1984-09-20 | 1984-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14238284U JPS6157516U (zh) | 1984-09-20 | 1984-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6157516U true JPS6157516U (zh) | 1986-04-17 |
Family
ID=30700704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14238284U Pending JPS6157516U (zh) | 1984-09-20 | 1984-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6157516U (zh) |
-
1984
- 1984-09-20 JP JP14238284U patent/JPS6157516U/ja active Pending