JPS6157515U - - Google Patents

Info

Publication number
JPS6157515U
JPS6157515U JP14240284U JP14240284U JPS6157515U JP S6157515 U JPS6157515 U JP S6157515U JP 14240284 U JP14240284 U JP 14240284U JP 14240284 U JP14240284 U JP 14240284U JP S6157515 U JPS6157515 U JP S6157515U
Authority
JP
Japan
Prior art keywords
substrate
groove
molecular beam
substrate holder
metal wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14240284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238442Y2 (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14240284U priority Critical patent/JPH0238442Y2/ja
Publication of JPS6157515U publication Critical patent/JPS6157515U/ja
Application granted granted Critical
Publication of JPH0238442Y2 publication Critical patent/JPH0238442Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP14240284U 1984-09-20 1984-09-20 Expired JPH0238442Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14240284U JPH0238442Y2 (en, 2012) 1984-09-20 1984-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14240284U JPH0238442Y2 (en, 2012) 1984-09-20 1984-09-20

Publications (2)

Publication Number Publication Date
JPS6157515U true JPS6157515U (en, 2012) 1986-04-17
JPH0238442Y2 JPH0238442Y2 (en, 2012) 1990-10-17

Family

ID=30700724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14240284U Expired JPH0238442Y2 (en, 2012) 1984-09-20 1984-09-20

Country Status (1)

Country Link
JP (1) JPH0238442Y2 (en, 2012)

Also Published As

Publication number Publication date
JPH0238442Y2 (en, 2012) 1990-10-17

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