JPS6157515U - - Google Patents

Info

Publication number
JPS6157515U
JPS6157515U JP14240284U JP14240284U JPS6157515U JP S6157515 U JPS6157515 U JP S6157515U JP 14240284 U JP14240284 U JP 14240284U JP 14240284 U JP14240284 U JP 14240284U JP S6157515 U JPS6157515 U JP S6157515U
Authority
JP
Japan
Prior art keywords
substrate
groove
molecular beam
substrate holder
metal wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14240284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238442Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14240284U priority Critical patent/JPH0238442Y2/ja
Publication of JPS6157515U publication Critical patent/JPS6157515U/ja
Application granted granted Critical
Publication of JPH0238442Y2 publication Critical patent/JPH0238442Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP14240284U 1984-09-20 1984-09-20 Expired JPH0238442Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14240284U JPH0238442Y2 (enrdf_load_stackoverflow) 1984-09-20 1984-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14240284U JPH0238442Y2 (enrdf_load_stackoverflow) 1984-09-20 1984-09-20

Publications (2)

Publication Number Publication Date
JPS6157515U true JPS6157515U (enrdf_load_stackoverflow) 1986-04-17
JPH0238442Y2 JPH0238442Y2 (enrdf_load_stackoverflow) 1990-10-17

Family

ID=30700724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14240284U Expired JPH0238442Y2 (enrdf_load_stackoverflow) 1984-09-20 1984-09-20

Country Status (1)

Country Link
JP (1) JPH0238442Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0238442Y2 (enrdf_load_stackoverflow) 1990-10-17

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