JPS6156019U - - Google Patents

Info

Publication number
JPS6156019U
JPS6156019U JP14034884U JP14034884U JPS6156019U JP S6156019 U JPS6156019 U JP S6156019U JP 14034884 U JP14034884 U JP 14034884U JP 14034884 U JP14034884 U JP 14034884U JP S6156019 U JPS6156019 U JP S6156019U
Authority
JP
Japan
Prior art keywords
turntable
type vacuum
stage type
rotary stage
detection means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14034884U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14034884U priority Critical patent/JPS6156019U/ja
Publication of JPS6156019U publication Critical patent/JPS6156019U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)
JP14034884U 1984-09-18 1984-09-18 Pending JPS6156019U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14034884U JPS6156019U (enrdf_load_stackoverflow) 1984-09-18 1984-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14034884U JPS6156019U (enrdf_load_stackoverflow) 1984-09-18 1984-09-18

Publications (1)

Publication Number Publication Date
JPS6156019U true JPS6156019U (enrdf_load_stackoverflow) 1986-04-15

Family

ID=30698697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14034884U Pending JPS6156019U (enrdf_load_stackoverflow) 1984-09-18 1984-09-18

Country Status (1)

Country Link
JP (1) JPS6156019U (enrdf_load_stackoverflow)

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