JPS6155339U - - Google Patents
Info
- Publication number
- JPS6155339U JPS6155339U JP12669984U JP12669984U JPS6155339U JP S6155339 U JPS6155339 U JP S6155339U JP 12669984 U JP12669984 U JP 12669984U JP 12669984 U JP12669984 U JP 12669984U JP S6155339 U JPS6155339 U JP S6155339U
- Authority
- JP
- Japan
- Prior art keywords
- belt
- wafer
- semiconductor substrate
- outer periphery
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12669984U JPS6155339U (cs) | 1984-08-21 | 1984-08-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12669984U JPS6155339U (cs) | 1984-08-21 | 1984-08-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6155339U true JPS6155339U (cs) | 1986-04-14 |
Family
ID=30685371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12669984U Pending JPS6155339U (cs) | 1984-08-21 | 1984-08-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6155339U (cs) |
-
1984
- 1984-08-21 JP JP12669984U patent/JPS6155339U/ja active Pending