JPS6155332U - - Google Patents

Info

Publication number
JPS6155332U
JPS6155332U JP14197584U JP14197584U JPS6155332U JP S6155332 U JPS6155332 U JP S6155332U JP 14197584 U JP14197584 U JP 14197584U JP 14197584 U JP14197584 U JP 14197584U JP S6155332 U JPS6155332 U JP S6155332U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
tape
roller
protective tape
peeling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14197584U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14197584U priority Critical patent/JPS6155332U/ja
Publication of JPS6155332U publication Critical patent/JPS6155332U/ja
Pending legal-status Critical Current

Links

JP14197584U 1984-09-17 1984-09-17 Pending JPS6155332U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14197584U JPS6155332U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-09-17 1984-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14197584U JPS6155332U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-09-17 1984-09-17

Publications (1)

Publication Number Publication Date
JPS6155332U true JPS6155332U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-04-14

Family

ID=30700307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14197584U Pending JPS6155332U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-09-17 1984-09-17

Country Status (1)

Country Link
JP (1) JPS6155332U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010247993A (ja) * 2010-05-24 2010-11-04 Nagano Automation Kk 保護フィルム剥取り方法および保護フィルム剥取り装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59174677A (ja) * 1983-03-24 1984-10-03 Nitto Electric Ind Co Ltd 保護フイルムの剥離方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59174677A (ja) * 1983-03-24 1984-10-03 Nitto Electric Ind Co Ltd 保護フイルムの剥離方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010247993A (ja) * 2010-05-24 2010-11-04 Nagano Automation Kk 保護フィルム剥取り方法および保護フィルム剥取り装置

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