JPS6155064B2 - - Google Patents
Info
- Publication number
- JPS6155064B2 JPS6155064B2 JP57024509A JP2450982A JPS6155064B2 JP S6155064 B2 JPS6155064 B2 JP S6155064B2 JP 57024509 A JP57024509 A JP 57024509A JP 2450982 A JP2450982 A JP 2450982A JP S6155064 B2 JPS6155064 B2 JP S6155064B2
- Authority
- JP
- Japan
- Prior art keywords
- dew condensation
- sensing element
- condensation sensing
- terminal electrode
- main component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005494 condensation Effects 0.000 claims description 29
- 238000009833 condensation Methods 0.000 claims description 29
- 239000000758 substrate Substances 0.000 claims description 8
- 239000011230 binding agent Substances 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 5
- 239000005388 borosilicate glass Substances 0.000 claims description 4
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 229910000510 noble metal Inorganic materials 0.000 claims description 2
- 238000010304 firing Methods 0.000 claims 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910018885 Pt—Au Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N lead(II) oxide Inorganic materials [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Description
【発明の詳細な説明】
本発明は、電気抵抗変化型の結露感知素子に関
するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a variable electrical resistance type dew condensation sensing element.
従来技術による結露感知素子の１例を第１図に
示す。 An example of a conventional dew condensation sensing element is shown in FIG.
図において、１はセラミツク等の絶縁基板、
２，２Ａは前記絶縁基板１上に形成された端子電
極、４，４Ａは、両者間に間隙３を残すように、
前記絶縁基板１上に、互いにほぼ平行に形成さ
れ、かつ、それぞれの一端が前記端子電極２，２
Ａに接続された対向電極である。 In the figure, 1 is an insulating substrate made of ceramic or the like;
2, 2A are terminal electrodes formed on the insulating substrate 1, 4, 4A are terminal electrodes formed on the insulating substrate 1, and 4, 4A are terminal electrodes that leave a gap 3 between them.
are formed substantially parallel to each other on the insulating substrate 1, and one end of each is connected to the terminal electrodes 2, 2.
A counter electrode connected to A.
第１図の結露感知素子は、通常、つぎのような
工程で製造される。 The dew condensation sensing element shown in FIG. 1 is normally manufactured by the following steps.
(1) セラミツクなどの絶縁基板１上に、貴金属を
主成分とする導電ペーストを印刷焼成して、半
田付可能な端子電極２，２Ａを形成する。(1) On an insulating substrate 1 made of ceramic or the like, a conductive paste containing a noble metal as a main component is printed and fired to form solderable terminal electrodes 2, 2A.
(2) その後、RuO2を主成分とし、Agを含まない
抵抗ペーストを印刷焼成して、上記端子電極
２，２Ａに電気的に接続され、かつ両者間に間
隙３を有する対向電極４，４Ａを形成する。(2) Thereafter, a resistance paste containing RuO 2 as a main component and containing no Ag is printed and fired to form counter electrodes 4, 4A which are electrically connected to the terminal electrodes 2, 2A and have a gap 3 between them. form.
第１図の結露感知素子の端子電極２，２Ａ間
に、5Vの直流電圧を印加した状態で、間隙３に
結露させた場合の、上記端子電極２，２Ａ間の抵
抗値変化の一例を、第２図に示す。 An example of the change in the resistance value between the terminal electrodes 2 and 2A when condensation is caused in the gap 3 with a DC voltage of 5 V applied between the terminal electrodes 2 and 2A of the dew condensation sensing element shown in FIG. Shown in Figure 2.
すなわち、前記抵抗値は、間隙３に結露を生ず
るとともに低下するが、結露した水が電気分解さ
れて消滅するにつれて、徐々に上昇する。そし
て、ついには前記抵抗値が、結露感知抵抗値とし
て設定した抵抗値を超えてしまう。 That is, the resistance value decreases as dew condenses in the gap 3, but gradually increases as the condensed water is electrolyzed and disappears. Finally, the resistance value exceeds the resistance value set as the dew condensation sensing resistance value.
このため、結露現象を継続して感知することが
不可能となるという問題点があつた。 Therefore, there was a problem in that it was impossible to continuously sense the dew condensation phenomenon.
本発明の目的は、上記した従来技術の欠点をな
くし、結露現象を継続して感知することのできる
結露感知素子を提供することにある。 SUMMARY OF THE INVENTION It is an object of the present invention to provide a dew condensation sensing element that can continuously sense dew condensation phenomena by eliminating the drawbacks of the prior art described above.
前述の目的を達成するために、本発明の結露感
知素子では、結露現象によつて、対向電極の間の
間隙に生じた水が消滅するのを防止するため、吸
着する水の量を増大させるべく、前記対向電極間
の間隙に、金属酸化物焼結体などからなる多孔質
感湿部材を設けている。 In order to achieve the above-mentioned object, the dew condensation sensing element of the present invention increases the amount of adsorbed water in order to prevent the water generated in the gap between the opposing electrodes from disappearing due to dew condensation. To this end, a porous moisture member made of a sintered metal oxide or the like is provided in the gap between the opposing electrodes.
本発明の実施例である結露感知素子の構造を第
３図の平面図及び第４図の断面図に示す。 The structure of a dew condensation sensing element according to an embodiment of the present invention is shown in a plan view in FIG. 3 and a cross-sectional view in FIG. 4.
これらの図において、第１図と同一の符号は同
一または同等部分をあらわしている。５は対向電
極４，４Ａおよびそれらの間の間隙３を覆うよう
に形成された多孔質感湿部材（例えば、金属酸化
物焼結体）である。 In these figures, the same reference numerals as in FIG. 1 represent the same or equivalent parts. Reference numeral 5 denotes a porous moisture member (for example, a metal oxide sintered body) formed to cover the counter electrodes 4, 4A and the gap 3 between them.
第３，４図の実施例の結露感知素子は、つぎの
ような工程で製造されることができる。 The dew condensation sensing element of the embodiment shown in FIGS. 3 and 4 can be manufactured by the following process.
(1) まず、セラミツク絶縁基板１上に、Pt―Au
を主成分とし、ホウケイ酸鉛ガラスを結合材と
する導電ペーストを印刷し、760〜1000℃にて
焼成して端子電極２，２Ａを形成する。(1) First, Pt-Au is placed on the ceramic insulating substrate 1.
A conductive paste containing lead borosilicate glass as a binder is printed and fired at 760 to 1000°C to form terminal electrodes 2 and 2A.
(2) その後、RuO2を主成分、ホウケイ酸鉛ガラ
スを結合材とし、Agを含まない抵抗ペースト
を印刷し、760〜1000℃にて焼成して、上記端
子電極２，２Ａに各々の一端が接続され、かつ
両者間に間隙３が形成される対向電極４，４Ａ
を形成する。(2) After that, a resistive paste containing RuO 2 as the main component and lead borosilicate glass as a binder and containing no Ag is printed, fired at 760 to 1000°C, and one end of each is attached to the terminal electrodes 2 and 2A. are connected to each other, and a gap 3 is formed between the opposing electrodes 4, 4A.
form.
(3) 更に、対向電極４，４Ａおよびこれらの間に
構成された間隙３を覆うように、Bi2O3を60wt
％以上含有し、他にB2O3，SiO2，PbO，Al2O3
を構成成分とするガラスを３〜40wt％含有す
るガラス質結合材と、BaTiO3とからなる多孔
質感湿材ペーストを印刷し、760〜1000℃にて
焼成して、感湿部材５を形成する。(3) Furthermore, 60wt of Bi 2 O 3 was added to cover the counter electrodes 4, 4A and the gap 3 formed between them.
% or more, and also contains B 2 O 3 , SiO 2 , PbO, Al 2 O 3
A porous moisture material paste consisting of BaTiO 3 and a vitreous binder containing 3 to 40 wt% of glass as a constituent component is printed and fired at 760 to 1000°C to form the moisture sensitive member 5. .
上記の構造を有する本発明の実施例の結露感知
素子の端子電極２，２Ａ間に、5Vの直流電圧を
印加した状態で結露させた場合、上記素子の端子
電極２，２Ａ間の抵抗値は、第５図に示すよう
に、時間と共に変化する。 When condensation is caused between the terminal electrodes 2 and 2A of the dew condensation sensing element of the embodiment of the present invention having the above structure with a DC voltage of 5V applied, the resistance value between the terminal electrodes 2 and 2A of the element is , changes with time, as shown in FIG.
すなわち、結露するとともに前記抵抗値が低下
することは、従来と同様である。しかし、本実施
例では、感湿部材５が多孔質であるので、結露に
より生じた水は感湿部材５に、充分に吸着され、
消滅しにくくなつている。このため、端子電極
２，２Ａ間の抵抗値が再上昇するに至る時間が大
幅に延長される。 That is, the resistance value decreases as dew condenses, as in the conventional case. However, in this embodiment, since the moisture-sensitive member 5 is porous, water generated due to dew condensation is sufficiently adsorbed to the moisture-sensitive member 5.
It is becoming difficult to disappear. Therefore, the time required for the resistance value between the terminal electrodes 2 and 2A to rise again is significantly extended.
上述したように、対向電極間に感湿部材を有し
ない従来の結露感知素子においては、結露後短時
間で、抵抗値が再上昇することがあるので、検知
のための電気回路が複雑となるのに対して、本発
明の結露感知素子においては、結露後の充分長い
時間にわたり、抵抗値の再上昇が阻止される。 As mentioned above, in conventional dew condensation sensing elements that do not have a moisture-sensitive member between opposing electrodes, the resistance value may rise again in a short time after condensation, making the electrical circuit for detection complicated. In contrast, in the dew condensation sensing element of the present invention, the resistance value is prevented from rising again for a sufficiently long period of time after dew condensation occurs.
このため、端子電極間の抵抗値が、基準値より
も高いか低いかの判定を、単純に結露現象に対応
させることができるようになり、検知電気回路が
簡単になる効果を有するものである。 Therefore, the determination of whether the resistance value between the terminal electrodes is higher or lower than the reference value can be made simply based on the phenomenon of condensation, which has the effect of simplifying the detection electric circuit. .
第１図は従来技術による結露感知素子の１例を
示す平面図、第２図は第１図の結露感知素子の性
能を説明するための、結露時の抵抗値の経時変化
を示すグラフ、第３図は本発明の結露感知素子の
１実施例を示す平面図、第４図は第３図の―
線にそう断面の部分拡大図、第５図は、第３図お
よび第４図の結露感知素子の性能を説明するため
の、結露時の抵抗値の経時変化を示すグラフであ
る。
１…セラミツク基板、２，２Ａ…端子電極、３
…間隙、４，４Ａ…対向電極、５…感湿部材。
FIG. 1 is a plan view showing an example of a condensation sensing element according to the prior art, and FIG. FIG. 3 is a plan view showing one embodiment of the dew condensation sensing element of the present invention, and FIG.
FIG. 5, which is a partially enlarged cross-sectional view along the line, is a graph showing the change in resistance value over time during dew condensation, for explaining the performance of the dew condensation sensing element shown in FIGS. 3 and 4. 1... Ceramic substrate, 2, 2A... Terminal electrode, 3
...Gap, 4,4A...Counter electrode, 5...Moisture sensitive member.
Claims (1)
と、該端子電極にそれぞれの一端を電気的に接続
された一対の対向電極と、該対向電極の間の間隙
に形成された多孔質感湿部材とを有してなる結露
感知素子において、上記多孔質感湿部材が、
BaTiO3を主成分とし、Bi2O3を含むガラスを結合
材とするペーストを印刷焼成して形成されたこと
を特徴とする結露感知素子。 ２ 対向電極が、Agを含まないRuO2を主成分と
し、ホウケイ酸鉛ガラス結合材とするペーストを
印刷焼成して形成されたことを特徴とする前記特
許請求の範囲第１項記載の結露感知素子。 ３ 端子電極が、Agを含まない貴金属を主成分
とし、ホウケイ酸鉛ガラスを結合材とするペース
トを印刷焼成して形成されたことを特徴とする前
記特許請求の範囲第１または第２項記載の結露感
知素子。[Claims] 1. On an insulating substrate such as ceramic, a terminal electrode, a pair of opposing electrodes each having one end electrically connected to the terminal electrode, and a device formed in a gap between the opposing electrodes. In the dew condensation sensing element comprising a porous textured moisture member, the porous textured moisture member
1. A dew condensation sensing element formed by printing and firing a paste containing BaTiO 3 as a main component and glass containing Bi 2 O 3 as a binder. 2. The dew condensation sensing device according to claim 1, wherein the counter electrode is formed by printing and firing a paste containing Ag-free RuO 2 as a main component and a lead borosilicate glass binder. element. 3. The terminal electrode according to claim 1 or 2, characterized in that the terminal electrode is formed by printing and firing a paste whose main component is a noble metal that does not contain Ag and whose binder is lead borosilicate glass. condensation sensing element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57024509A JPS58142252A (en) | 1982-02-19 | 1982-02-19 | Sensing element for dew condensation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57024509A JPS58142252A (en) | 1982-02-19 | 1982-02-19 | Sensing element for dew condensation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58142252A JPS58142252A (en) | 1983-08-24 |
| JPS6155064B2 true JPS6155064B2 (en) | 1986-11-26 |
Family
ID=12140141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57024509A Granted JPS58142252A (en) | 1982-02-19 | 1982-02-19 | Sensing element for dew condensation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58142252A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE68928441T2 (en) * | 1988-11-29 | 1998-03-12 | Ngk Spark Plug Co | A moisture sensor using an electrochemical cell |
| FI92440C (en) * | 1993-08-23 | 1994-11-10 | Vaisala Oy | Detector and method for observing the presence of a liquid and / or a change thereof |
| EP1482306B1 (en) | 2003-05-30 | 2014-09-24 | Ngk Spark Plug Co., Ltd | Humidity sensor and method of using the humidity sensor |
| US9987658B1 (en) * | 2017-03-29 | 2018-06-05 | The United States Of America As Represented By The Aministrator Of The National Aeronautics And Space Administration | Method of manufacturing a humidity sensing material |
| JP6819516B2 (en) * | 2017-08-30 | 2021-01-27 | トヨタ自動車株式会社 | Humidifier and fuel cell system equipped with it |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS533386A (en) * | 1976-06-30 | 1978-01-13 | Yokogawa Hokushin Electric Corp | Electrode for dew point instrument |
| JPS5716961B2 (en) * | 1975-03-31 | 1982-04-08 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5716961U (en) * | 1980-07-03 | 1982-01-28 |
-
1982
- 1982-02-19 JP JP57024509A patent/JPS58142252A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5716961B2 (en) * | 1975-03-31 | 1982-04-08 | ||
| JPS533386A (en) * | 1976-06-30 | 1978-01-13 | Yokogawa Hokushin Electric Corp | Electrode for dew point instrument |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58142252A (en) | 1983-08-24 |
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