Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac IncfiledCriticalUlvac Inc
Priority to JP57039337ApriorityCriticalpatent/JPS58158255A/ja
Publication of JPS58158255ApublicationCriticalpatent/JPS58158255A/ja
Publication of JPS6154598B2publicationCriticalpatent/JPS6154598B2/ja
증착필름 및 그 형상측정방법, 제조공정제어방법, 제조방법, 형상측정장치 및 제조공정제어장치(deposition film, method of measuring shape of deposition film, method of controlling manufacturing processes, manufacturing method, shape measuring apparatus and apparatus for controlling manufacturing processes)