JPS6154562U - - Google Patents
Info
- Publication number
- JPS6154562U JPS6154562U JP13998684U JP13998684U JPS6154562U JP S6154562 U JPS6154562 U JP S6154562U JP 13998684 U JP13998684 U JP 13998684U JP 13998684 U JP13998684 U JP 13998684U JP S6154562 U JPS6154562 U JP S6154562U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- control valve
- diaphragm
- electrodeposition
- glass plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004070 electrodeposition Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 239000012530 fluid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13998684U JPS6154562U (enExample) | 1984-09-14 | 1984-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13998684U JPS6154562U (enExample) | 1984-09-14 | 1984-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6154562U true JPS6154562U (enExample) | 1986-04-12 |
Family
ID=30698345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13998684U Pending JPS6154562U (enExample) | 1984-09-14 | 1984-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6154562U (enExample) |
-
1984
- 1984-09-14 JP JP13998684U patent/JPS6154562U/ja active Pending