JPS6154459U - - Google Patents
Info
- Publication number
- JPS6154459U JPS6154459U JP13874984U JP13874984U JPS6154459U JP S6154459 U JPS6154459 U JP S6154459U JP 13874984 U JP13874984 U JP 13874984U JP 13874984 U JP13874984 U JP 13874984U JP S6154459 U JPS6154459 U JP S6154459U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- grinding fluid
- fluid supply
- grinding
- supply device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 8
- 239000007921 spray Substances 0.000 claims 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13874984U JPS6154459U (ko) | 1984-09-14 | 1984-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13874984U JPS6154459U (ko) | 1984-09-14 | 1984-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6154459U true JPS6154459U (ko) | 1986-04-12 |
Family
ID=30697147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13874984U Pending JPS6154459U (ko) | 1984-09-14 | 1984-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6154459U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010149222A (ja) * | 2008-12-25 | 2010-07-08 | Disco Abrasive Syst Ltd | 研削装置 |
| WO2011086715A1 (ja) * | 2010-01-13 | 2011-07-21 | 株式会社アライドマテリアル | 超砥粒ホイールおよびそれを用いたウエハの製造方法ならびにウエハ |
-
1984
- 1984-09-14 JP JP13874984U patent/JPS6154459U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010149222A (ja) * | 2008-12-25 | 2010-07-08 | Disco Abrasive Syst Ltd | 研削装置 |
| WO2011086715A1 (ja) * | 2010-01-13 | 2011-07-21 | 株式会社アライドマテリアル | 超砥粒ホイールおよびそれを用いたウエハの製造方法ならびにウエハ |
| CN102712076A (zh) * | 2010-01-13 | 2012-10-03 | 联合材料公司 | 超级磨粒砂轮、使用了该超级磨粒砂轮的晶片的制造方法以及晶片 |
| CN102712076B (zh) * | 2010-01-13 | 2014-10-15 | 联合材料公司 | 超级磨粒砂轮、使用了该超级磨粒砂轮的晶片的制造方法以及晶片 |
| US9011206B2 (en) | 2010-01-13 | 2015-04-21 | A.L.M.T. Corp. | Super abrasive wheel with dispensing capability, method of manufacturing wafer using the same, and wafer |