JPS6153359A - Light-transmitting resin composition - Google Patents

Light-transmitting resin composition

Info

Publication number
JPS6153359A
JPS6153359A JP17560184A JP17560184A JPS6153359A JP S6153359 A JPS6153359 A JP S6153359A JP 17560184 A JP17560184 A JP 17560184A JP 17560184 A JP17560184 A JP 17560184A JP S6153359 A JPS6153359 A JP S6153359A
Authority
JP
Japan
Prior art keywords
thermal expansion
light
resin
resin composition
expansion coefficient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17560184A
Other languages
Japanese (ja)
Inventor
Katsuyoshi Iizaka
飯阪 捷義
Fumiaki Baba
文明 馬場
Tetsuo Mitani
徹男 三谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP17560184A priority Critical patent/JPS6153359A/en
Publication of JPS6153359A publication Critical patent/JPS6153359A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a light-transmitting resin composition having adjustable thermal expansion coefficient, by compounding a dimethylsiloxane resin with a metal oxide such as silica, alumina, etc. having an average particle size falling within a specific range. CONSTITUTION:(A) A varnish composed of a dimethylsiloxane resin is compounded with (B) one or more kinds of metal oxides selected from silica, alumina, MgO, BeO, Y2O3, ZrO2 and ZnO and having an average particle diameter of 0.001-0.1mum. The mixture is kneaded with a roller, dried e.g. at 100-105 deg.C for 5min, and formed to a desired form e.g. by compression molding, or integrated with another material having a specific thermal expansion coefficient. The amount of the component B is selected according to the desired thermal expansion coefficient.

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は、熱膨張係数が調節できる光透過性樹脂組成
物に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a light-transmitting resin composition whose thermal expansion coefficient can be adjusted.

〔従来の技術〕[Conventional technology]

ある種の半導体装置、例えば、EPROMや光結合半醇
体装置などにおいて、充填材と含んだ比較的低熱膨張係
数の樹脂組成物からなるケースや被覆物に、光透過機能
がある前記と異なる物質例えば無機ガラスやシリコン樹
脂単体が一体化されて使用される場合がある。この場合
、後者の熱膨張係数が前者のそれと異なることが、使用
中や加熱によシ、機械的あるいは電気的に信頼性の低下
する原因となる。
In some types of semiconductor devices, such as EPROMs and optically coupled semi-solid devices, a case or covering made of a resin composition with a relatively low coefficient of thermal expansion containing a filler may be made of a different substance that has a light transmitting function. For example, inorganic glass or silicone resin alone may be used in an integrated manner. In this case, the fact that the coefficient of thermal expansion of the latter is different from that of the former causes mechanical or electrical reliability to deteriorate during use or due to heating.

そのため、上記無機ガラスやシリコン樹脂単体等に代え
て、従来、有機高分子物質に平均粒径1μm以上の無機
質粒子を添加することによシ、有機高分子物質の熱膨張
係数を低下させることが試みられた。
Therefore, it has conventionally been possible to reduce the coefficient of thermal expansion of an organic polymer by adding inorganic particles with an average particle size of 1 μm or more to the organic polymer instead of the above-mentioned inorganic glass or silicone resin alone. Attempted.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

一般的に上記のような従来用いた有機高分子物質、即ち
樹脂中に、芳香族、カルボキシル基、カルボニル基、2
重結合および低分子のイオン性不純物等を含むと、半導
体装置関係などで使用される短波長側、特に、紫外線に
不透過となり、その樹脂は極めて限られてくる。又、樹
脂単体では熱膨張係数は、I X 10 ’/℃程度の
大きな値となん一方、一般的に行なわれている樹脂の熱
膨張係数を低下させるため、機械的性質の改善と併わせ
て、平均粒径1μm以上の無機質粒子を樹脂に添加する
場合、組成物は光に対して4透男となるといった問題点
があった。
In general, the organic polymer substances conventionally used as described above, that is, resins, contain aromatic, carboxyl, carbonyl,
If the resin contains heavy bonds, low-molecular ionic impurities, etc., it becomes impermeable to short wavelengths, particularly ultraviolet rays, used in semiconductor devices, and the number of resins available for this resin is extremely limited. In addition, the coefficient of thermal expansion of a resin alone is as large as I x 10'/°C, but in order to lower the coefficient of thermal expansion of a resin, which is generally done, it is necessary to improve the mechanical properties. However, when inorganic particles having an average particle size of 1 μm or more are added to a resin, there is a problem that the composition becomes transparent to light by 4 μm.

この発明は、かかる問題点を解決するため罠なされたも
ので、光透過機能があり、熱膨張係数が調節可能な樹脂
組成物と得ることを目的とする。
The present invention was made to solve these problems, and aims to provide a resin composition that has a light transmitting function and whose coefficient of thermal expansion can be adjusted.

c問題点を解決するための手段] この発明の光透過性樹脂組成物は、ジメチルシロキサン
樹脂と、平均粒径0.001〜0.1μmの金属酸化物
であるシリψ、アルミナ、MgO、BeO、Y2O3、
ZrO2*・よびZmOの内の少なくとも一種とを含む
もので1.る。  。
c. Means for Solving Problems] The light-transmitting resin composition of the present invention contains dimethylsiloxane resin and metal oxides such as silica, alumina, MgO, and BeO having an average particle size of 0.001 to 0.1 μm. ,Y2O3,
1. containing at least one of ZrO2* and ZmO; Ru. .

〔問題点・、−解決するための手段の作用〕この発明t
゛係わるジメチルシロキサン樹脂は、光透過性でろt2
、この発明に係わる平均粒径0.001〜0.1.un
の全域0化物であるシリカ、アルミナ、MgO、Boo
 %Y20  ZrO2およびZmOは、熱膨張率が小
さく、光透過へであ)、粒径が小さいため屈折による乱
反射をt’することができる。そのため、上記金属酸化
物の白の少・なくとも一種をジメチルシロキサン樹脂に
1.oすることにより、樹脂の光透過性を損うことな電
熱膨張率を調節できるのである。
[Problem... - Effect of means for solving] This invention
゛The dimethylsiloxane resin involved is light transparent.
, the average particle size according to this invention is 0.001 to 0.1. un
Silica, alumina, MgO, Boo
%Y20 ZrO2 and ZmO have a small coefficient of thermal expansion and are effective for light transmission), and their small particle diameters can reduce diffused reflection due to refraction. Therefore, at least one type of white metal oxide is added to dimethylsiloxane resin in 1. By doing so, it is possible to adjust the electrothermal expansion coefficient without impairing the optical transparency of the resin.

〔実施例〕〔Example〕

この発明に係わるシリカ、アルミナ、MgO1Beo 
、Y2O3、ZrO2およびZmOの金属酸化物の平均
粒径はU、OU1〜0.1μmの範囲でなければならな
い。0.1μm以上では光線に対し不透明となり、0.
001μm以下では気孔物の存在が急激に大きくなり、
光線透過性が悪くなって好ましくない。上記金属酸化物
の内、シリカに関しては、市販の商品名がAeroai
l 、 Valron 、 Cub −0−silなど
が利用され、また、他の金属酸化物に関しては例えば相
当するイオンや原子からの核生成と成長の2つの過程に
よって粒子をつくる方法などにより容易に得られる。
Silica, alumina, MgO1Beo according to this invention
The average particle size of the metal oxides of , Y2O3, ZrO2 and ZmO should be in the range of U,OU1-0.1 μm. If it is 0.1 μm or more, it becomes opaque to light;
001 μm or less, the presence of porous substances increases rapidly,
This is not preferable because the light transmittance deteriorates. Among the metal oxides mentioned above, regarding silica, the commercially available product name is Aeroai.
1, Valron, Cub-0-sil, etc. are used, and other metal oxides can be easily obtained, for example, by a method of creating particles through two processes of nucleation and growth from corresponding ions or atoms. .

この発明に係わるジメチルシロキサン樹脂は、短波長側
(0,4μm以下)の紫外線において、光線透過性樹脂
である。ジメチルシロキサン樹脂以外にも、ポリ弗化ビ
ニリデン(P V E”2)やポリ−4−メチルペンテ
ンなども短ly:長側での光線透過性樹脂であるが、こ
れらは、いずれも上記金属酸化物との適合性が悪く好ま
しくない。
The dimethylsiloxane resin according to the present invention is a resin that is transparent to ultraviolet light on the short wavelength side (0.4 μm or less). In addition to dimethylsiloxane resins, polyvinylidene fluoride (PVE"2) and poly-4-methylpentene are also light-transparent resins on the short and long sides, but they all have the above metal oxidation properties. It is undesirable because it has poor compatibility with objects.

次にこの発明の光透過性樹脂組成物を、上記ジメチルシ
ロキサン樹脂およ、゛2上記金属酸化物によシ得る場合
の製造方法の一例V下記に示す。即ち、ジメチルシロキ
サ;1射脂よりするワニス(粘度−約100センチボイ
ス、溶剤−;・ルエン、固形分5056)(I)に対し
、平均入r ’% 0.001 ” 0.1 p mの
範囲にあるシリカ、アルミナ、S、gO、BeO、Y2
O3、ZrO2、ZmOのいずれか一種(■)あ乏りは
これらの混合物(■りを、所定の熱膨張係数に応4て適
宜量混加し、ローラにて混練後、該混練物(t、)を、
例えば、100〜105℃で5分間、乾燥する。λに、
乾燥した該混合物(ff)を、通常の成形法、例λ、で
圧縮成形により、所望の形状に成形、あるいは 所定の
熱膨張係数の相手部材と一体化成形する。
Next, an example of a method for producing the light-transmitting resin composition of the present invention using the dimethylsiloxane resin and the metal oxide described above is shown below. That is, dimethyl siloxa; average content r'% 0.001'' 0.1 pm for varnish (viscosity: about 100 centimeters, solvent: luene, solid content: 5056) (I) Silica, alumina, S, gO, BeO, Y2 in the range of
If any one of O3, ZrO2, and ZmO (■) is deficient, a mixture of these (■) is mixed in an appropriate amount according to the predetermined coefficient of thermal expansion, and after kneading with a roller, the kneaded product (t ,)of,
For example, dry at 100 to 105°C for 5 minutes. To λ,
The dried mixture (ff) is molded into a desired shape by compression molding using a conventional molding method, for example λ, or integrally molded with a mating member having a predetermined coefficient of thermal expansion.

以下、この発明を実施例によシも体的に説明するが、こ
の発明は、これらの実施t’+のみに限定されるもので
はない。
Hereinafter, the present invention will be concretely explained with reference to examples, but the present invention is not limited to these examples.

実施例1゜ シリコニ〆ワニス(K R−220,mmシリコン)1
00重量部に対し、Aerosil (日本エアロジル
)400重量部を添加し、ローラにて混練する。該混練
物を100〜105℃のオープン中で5分間加熱乾燥す
る。次に乾燥した該混合物を、ホットプレスによシ、1
80℃、1時間、100Kg/calの加圧下でプレス
キュアし、1朋厚さの成形板を作成する。該成形板の紫
外線(波長、0.25μm)透過率は、50%以上であ
り、その熱膨張係&は、2X10−″117℃である。
Example 1゜Silicone varnish (K R-220, mm silicone) 1
400 parts by weight of Aerosil (Japan Aerosil) were added to 00 parts by weight and kneaded with a roller. The kneaded product is heated and dried in an open air at 100 to 105°C for 5 minutes. Next, the dried mixture was put into a hot press,
Press cure was performed at 80° C. for 1 hour under a pressure of 100 kg/cal to produce a molded plate with a thickness of 1 mm. The ultraviolet (wavelength, 0.25 μm) transmittance of the molded plate is 50% or more, and its thermal expansion coefficient & is 2×10−″117°C.

実施例2゜ 常法により、Zroc12  とYc13  の混合溶
液から、中和あるいは加水分解で粒径的0.02μmの
Y2O3固溶ZrO2超微粉体を得る。ジメチルシリコ
ン樹脂(K E −1o6、信越シリコン)100重量
部に上記無機質粒子、100重量部を添加し、ローラに
て混練する。該混練物を、ホットプレスにより、10K
g、乙−加圧下で、80℃、5時間、次いで、120℃
、3時間キュアし、l+w厚さの成形板を作成する。
Example 2 A ZrO2 ultrafine powder containing Y2O3 solid solution having a particle size of 0.02 μm is obtained from a mixed solution of Zroc12 and Yc13 by neutralization or hydrolysis using a conventional method. 100 parts by weight of the above inorganic particles were added to 100 parts by weight of dimethyl silicone resin (KE-1o6, Shin-Etsu Silicon), and kneaded with a roller. The kneaded material was heated to 10K using a hot press.
g, B - Under pressure at 80°C for 5 hours, then at 120°C
, and cured for 3 hours to produce a molded plate having a thickness of l+w.

該成形板の紫外線(波長、0.30μm)透過率は、5
0チ以上あり、その熱膨張係数は、5X10−5/”C
である。
The ultraviolet (wavelength, 0.30 μm) transmittance of the molded plate is 5
0 cm or more, and its thermal expansion coefficient is 5X10-5/"C
It is.

実施例3゜ 実施例1のシリコンワニス100重量部に、平均粒径0
.1μmのアルミナ研摩粉、200重量部を悉加し、実
施例1の方法に従って、1fl厚さの成形板を作成する
。該成形板の短波長光a、<波長、0.40μm)透過
率は50%以上あシ、その熱膨張係数は3xl□−s/
℃ である。
Example 3゜To 100 parts by weight of the silicone varnish of Example 1, an average particle size of 0 was added.
.. 200 parts by weight of 1 μm alumina abrasive powder was added to prepare a molded plate with a thickness of 1 fl according to the method of Example 1. The molded plate has a transmittance of short wavelength light a, <wavelength, 0.40 μm) of 50% or more, and its thermal expansion coefficient is 3xl□-s/
It is ℃.

以上のことから、ポリジメチルシロキサン樹脂の熱膨張
係数が30 Xi O−5〜80X10−5/”Cであ
るのに対し、この発明の光透過性樹脂組成物は、ポリジ
メチルシロキサン樹脂に上記金属酸化物を適宜加えるこ
とにより、短波長側まで広い波長範囲で光線透過性があ
り、熱膨張係数を所定の値に低下調節できることが解る
From the above, while the coefficient of thermal expansion of polydimethylsiloxane resin is 30 Xi O-5 to 80X10-5/''C, the light-transmitting resin composition of the present invention has a polydimethylsiloxane resin containing the above-mentioned metal. It can be seen that by appropriately adding an oxide, the material has light transmittance in a wide wavelength range up to the short wavelength side, and the coefficient of thermal expansion can be adjusted to be lowered to a predetermined value.

ところで、この発明の光透過性樹脂組成物は、例えば半
導体装置関連に用いられるが、他に1光透過性で低熱膨
張係数を要する形状の複雑な部材の成形などに利用でき
る。又、比較的低熱膨張係数のものと一体化するためだ
け忙用いられるのでなく、単独使用もできる。
Incidentally, the light-transmitting resin composition of the present invention is used, for example, in connection with semiconductor devices, but it can also be used for molding members with complex shapes that require one light-transmitting property and a low coefficient of thermal expansion. Moreover, it is not only used for integrating with a material having a relatively low coefficient of thermal expansion, but also can be used alone.

〔発明の効果〕〔Effect of the invention〕

この発明は以上説明したとうり、この発明は、ジメチル
シロキサン樹脂と、平均粒径0.001−0.1μmの
金属酸化物であるシリカ、アルミナ、MgO□、BeO
、Y2O3、ZrO2およびZmOの内の少なくとも一
種とを含むものを用いることにょシ、熱膨張係数が調節
可能な光透過性樹脂組成物を得ることかできる。
As explained above, this invention uses dimethylsiloxane resin and metal oxides such as silica, alumina, MgO□, BeO
, Y2O3, ZrO2 and ZmO, it is possible to obtain a light-transmitting resin composition whose thermal expansion coefficient can be adjusted.

Claims (1)

【特許請求の範囲】[Claims] ジメチルシロキサン樹脂と、平均粒径0.001〜0.
1μmの金属酸化物であるシリカ、アルミナ、MgO、
BeO、Y_2O_3、ZrO_2およびZmOの内の
少なくとも一種とを含む光透過性樹脂組成物。
Dimethylsiloxane resin and an average particle size of 0.001 to 0.
Silica, alumina, MgO, which are 1 μm metal oxides,
A light-transmitting resin composition containing at least one of BeO, Y_2O_3, ZrO_2 and ZmO.
JP17560184A 1984-08-21 1984-08-21 Light-transmitting resin composition Pending JPS6153359A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17560184A JPS6153359A (en) 1984-08-21 1984-08-21 Light-transmitting resin composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17560184A JPS6153359A (en) 1984-08-21 1984-08-21 Light-transmitting resin composition

Publications (1)

Publication Number Publication Date
JPS6153359A true JPS6153359A (en) 1986-03-17

Family

ID=15998940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17560184A Pending JPS6153359A (en) 1984-08-21 1984-08-21 Light-transmitting resin composition

Country Status (1)

Country Link
JP (1) JPS6153359A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6218470A (en) * 1985-06-05 1987-01-27 ゼネラル・エレクトリツク・カンパニイ Method for preventing early curing of silicone composition and prepared composition
JP2006299251A (en) * 2005-03-22 2006-11-02 Jsr Corp Composition for forming high-refractive index material and cured form of the composition, and method for producing the composition

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6218470A (en) * 1985-06-05 1987-01-27 ゼネラル・エレクトリツク・カンパニイ Method for preventing early curing of silicone composition and prepared composition
JPH0480068B2 (en) * 1985-06-05 1992-12-17 Gen Electric
JP2006299251A (en) * 2005-03-22 2006-11-02 Jsr Corp Composition for forming high-refractive index material and cured form of the composition, and method for producing the composition

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