JPS6152709B2 - - Google Patents

Info

Publication number
JPS6152709B2
JPS6152709B2 JP12440480A JP12440480A JPS6152709B2 JP S6152709 B2 JPS6152709 B2 JP S6152709B2 JP 12440480 A JP12440480 A JP 12440480A JP 12440480 A JP12440480 A JP 12440480A JP S6152709 B2 JPS6152709 B2 JP S6152709B2
Authority
JP
Japan
Prior art keywords
gas
flow rate
flow
valve
switching valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12440480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5748613A (en
Inventor
Osamu Hashimoto
Kazuo Sugimoto
Akio Fujita
Yoshihisa Urushida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kawaguchiko Seimitsu KK
Original Assignee
Kawaguchiko Seimitsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawaguchiko Seimitsu KK filed Critical Kawaguchiko Seimitsu KK
Priority to JP12440480A priority Critical patent/JPS5748613A/ja
Publication of JPS5748613A publication Critical patent/JPS5748613A/ja
Publication of JPS6152709B2 publication Critical patent/JPS6152709B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/06—Indicating or recording devices

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
  • Control Of Non-Electrical Variables (AREA)
JP12440480A 1980-09-08 1980-09-08 Flow rate display unit of flow rate control device Granted JPS5748613A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12440480A JPS5748613A (en) 1980-09-08 1980-09-08 Flow rate display unit of flow rate control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12440480A JPS5748613A (en) 1980-09-08 1980-09-08 Flow rate display unit of flow rate control device

Publications (2)

Publication Number Publication Date
JPS5748613A JPS5748613A (en) 1982-03-20
JPS6152709B2 true JPS6152709B2 (enrdf_load_stackoverflow) 1986-11-14

Family

ID=14884606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12440480A Granted JPS5748613A (en) 1980-09-08 1980-09-08 Flow rate display unit of flow rate control device

Country Status (1)

Country Link
JP (1) JPS5748613A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5320604B2 (ja) * 2011-09-12 2013-10-23 株式会社メトラン 気体供給ユニットおよび気体混合装置
JP2013059384A (ja) * 2011-09-12 2013-04-04 Metoran:Kk 気体混合装置およびシステム

Also Published As

Publication number Publication date
JPS5748613A (en) 1982-03-20

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