JPS6151734U - - Google Patents

Info

Publication number
JPS6151734U
JPS6151734U JP13811284U JP13811284U JPS6151734U JP S6151734 U JPS6151734 U JP S6151734U JP 13811284 U JP13811284 U JP 13811284U JP 13811284 U JP13811284 U JP 13811284U JP S6151734 U JPS6151734 U JP S6151734U
Authority
JP
Japan
Prior art keywords
metal film
substrate
heat treatment
temperature
infrared heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13811284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13811284U priority Critical patent/JPS6151734U/ja
Publication of JPS6151734U publication Critical patent/JPS6151734U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
JP13811284U 1984-09-10 1984-09-10 Pending JPS6151734U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13811284U JPS6151734U (enrdf_load_stackoverflow) 1984-09-10 1984-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13811284U JPS6151734U (enrdf_load_stackoverflow) 1984-09-10 1984-09-10

Publications (1)

Publication Number Publication Date
JPS6151734U true JPS6151734U (enrdf_load_stackoverflow) 1986-04-07

Family

ID=30696511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13811284U Pending JPS6151734U (enrdf_load_stackoverflow) 1984-09-10 1984-09-10

Country Status (1)

Country Link
JP (1) JPS6151734U (enrdf_load_stackoverflow)

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