JPS6151734U - - Google Patents
Info
- Publication number
- JPS6151734U JPS6151734U JP13811284U JP13811284U JPS6151734U JP S6151734 U JPS6151734 U JP S6151734U JP 13811284 U JP13811284 U JP 13811284U JP 13811284 U JP13811284 U JP 13811284U JP S6151734 U JPS6151734 U JP S6151734U
- Authority
- JP
- Japan
- Prior art keywords
- metal film
- substrate
- heat treatment
- temperature
- infrared heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 12
- 238000012544 monitoring process Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 2
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13811284U JPS6151734U (cs) | 1984-09-10 | 1984-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13811284U JPS6151734U (cs) | 1984-09-10 | 1984-09-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6151734U true JPS6151734U (cs) | 1986-04-07 |
Family
ID=30696511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13811284U Pending JPS6151734U (cs) | 1984-09-10 | 1984-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6151734U (cs) |
-
1984
- 1984-09-10 JP JP13811284U patent/JPS6151734U/ja active Pending
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