JPS6151657U - - Google Patents
Info
- Publication number
- JPS6151657U JPS6151657U JP13515084U JP13515084U JPS6151657U JP S6151657 U JPS6151657 U JP S6151657U JP 13515084 U JP13515084 U JP 13515084U JP 13515084 U JP13515084 U JP 13515084U JP S6151657 U JPS6151657 U JP S6151657U
- Authority
- JP
- Japan
- Prior art keywords
- film
- electron beam
- magnification
- moving
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims 3
- 238000003384 imaging method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Microscoopes, Condenser (AREA)
- Cameras Adapted For Combination With Other Photographic Or Optical Apparatuses (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13515084U JPS6151657U (xx) | 1984-09-07 | 1984-09-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13515084U JPS6151657U (xx) | 1984-09-07 | 1984-09-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6151657U true JPS6151657U (xx) | 1986-04-07 |
Family
ID=30693649
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13515084U Pending JPS6151657U (xx) | 1984-09-07 | 1984-09-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6151657U (xx) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5745156B2 (xx) * | 1975-02-10 | 1982-09-25 |
-
1984
- 1984-09-07 JP JP13515084U patent/JPS6151657U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5745156B2 (xx) * | 1975-02-10 | 1982-09-25 |
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