JPS6151109U - - Google Patents

Info

Publication number
JPS6151109U
JPS6151109U JP13753284U JP13753284U JPS6151109U JP S6151109 U JPS6151109 U JP S6151109U JP 13753284 U JP13753284 U JP 13753284U JP 13753284 U JP13753284 U JP 13753284U JP S6151109 U JPS6151109 U JP S6151109U
Authority
JP
Japan
Prior art keywords
utility
model registration
nitride
oxide
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13753284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13753284U priority Critical patent/JPS6151109U/ja
Publication of JPS6151109U publication Critical patent/JPS6151109U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13753284U 1984-09-11 1984-09-11 Pending JPS6151109U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13753284U JPS6151109U (enrdf_load_stackoverflow) 1984-09-11 1984-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13753284U JPS6151109U (enrdf_load_stackoverflow) 1984-09-11 1984-09-11

Publications (1)

Publication Number Publication Date
JPS6151109U true JPS6151109U (enrdf_load_stackoverflow) 1986-04-05

Family

ID=30695947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13753284U Pending JPS6151109U (enrdf_load_stackoverflow) 1984-09-11 1984-09-11

Country Status (1)

Country Link
JP (1) JPS6151109U (enrdf_load_stackoverflow)

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