JPS61502218A - 離間配置した装置の相対位置変化の確認装置 - Google Patents

離間配置した装置の相対位置変化の確認装置

Info

Publication number
JPS61502218A
JPS61502218A JP60502664A JP50266485A JPS61502218A JP S61502218 A JPS61502218 A JP S61502218A JP 60502664 A JP60502664 A JP 60502664A JP 50266485 A JP50266485 A JP 50266485A JP S61502218 A JPS61502218 A JP S61502218A
Authority
JP
Japan
Prior art keywords
light
prism
coordinate
axis
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60502664A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0431323B2 (en, 2012
Inventor
リーゼン　ハインリツヒ
Original Assignee
プリユ−フテクニ−ク　デイ−テル　ブツシユ　ウント　パルトネル　ゲ−エムベ−ハ−　ウント　コ−
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by プリユ−フテクニ−ク　デイ−テル　ブツシユ　ウント　パルトネル　ゲ−エムベ−ハ−　ウント　コ− filed Critical プリユ−フテクニ−ク　デイ−テル　ブツシユ　ウント　パルトネル　ゲ−エムベ−ハ−　ウント　コ−
Publication of JPS61502218A publication Critical patent/JPS61502218A/ja
Publication of JPH0431323B2 publication Critical patent/JPH0431323B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Jib Cranes (AREA)
JP60502664A 1984-05-22 1985-05-22 離間配置した装置の相対位置変化の確認装置 Granted JPS61502218A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19843419059 DE3419059A1 (de) 1984-05-22 1984-05-22 Vorrichtung zum feststellen von aenderungen der gegenseitigen position gesondert montierter maschinen
DE3419059.7 1984-05-22

Publications (2)

Publication Number Publication Date
JPS61502218A true JPS61502218A (ja) 1986-10-02
JPH0431323B2 JPH0431323B2 (en, 2012) 1992-05-26

Family

ID=6236565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60502664A Granted JPS61502218A (ja) 1984-05-22 1985-05-22 離間配置した装置の相対位置変化の確認装置

Country Status (5)

Country Link
US (1) US4725738A (en, 2012)
EP (1) EP0183811B1 (en, 2012)
JP (1) JPS61502218A (en, 2012)
DE (2) DE3419059A1 (en, 2012)
WO (1) WO1985005443A1 (en, 2012)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3625641A1 (de) * 1986-07-29 1988-02-11 Busch Dieter & Co Prueftech Elektrooptische vorrichtung fuer die dauerueberwachung der gegenseitigen raeumlichen lage zweier maschinen oder maschinenteile
US5491553A (en) * 1994-06-01 1996-02-13 Phillips Kiln Service Company Of Canada, Ltd. Triple laser rotary kiln alignment system
SE510988C2 (sv) * 1997-08-22 1999-07-19 Valmet Karlstad Ab Sätt och mätanordning att beröringsfritt mäta rakhet vid en mantelyta
US6169290B1 (en) 1997-08-22 2001-01-02 Valmet-Karlstad Ab Method and measuring device for measuring at an envelope surface
US7129694B2 (en) * 2002-05-23 2006-10-31 Applied Materials, Inc. Large substrate test system
CN101298982B (zh) * 2008-07-02 2010-06-02 瑞安市瑞光光电仪器有限公司 回转轴同轴度的校准方法及其校准仪

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3443872A (en) * 1964-08-31 1969-05-13 Honeywell Inc Remote object orientation measuring device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2703505A (en) * 1948-07-03 1955-03-08 Kearney & Trecker Corp Apparatus for aligning machine elements
US3323408A (en) * 1962-09-04 1967-06-06 Bishop Robert Edward Optical alignment system
SE361869B (en, 2012) * 1972-04-14 1973-11-19 Asea Ab
US3923402A (en) * 1973-01-10 1975-12-02 Beloit Corp Method and apparatus for aligning paper machinery
DE2659536C2 (de) * 1976-12-30 1978-07-20 Helmut Ing.(Grad.) Thierbach Meßeinrichtung zur Ermittlung von Lage- oder Maßveranderungen bei Bauoder Maschinenteilen
US4097157A (en) * 1977-03-02 1978-06-27 Fmc Corporation Vehicle wheel aligner for measuring front wheel toe with respect to the rear wheel axis of rotation
US4518855A (en) * 1982-09-30 1985-05-21 Spring-Mornne, Inc. Method and apparatus for statically aligning shafts and monitoring shaft alignment

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3443872A (en) * 1964-08-31 1969-05-13 Honeywell Inc Remote object orientation measuring device

Also Published As

Publication number Publication date
US4725738A (en) 1988-02-16
WO1985005443A1 (en) 1985-12-05
EP0183811A1 (de) 1986-06-11
JPH0431323B2 (en, 2012) 1992-05-26
DE3567098D1 (en) 1989-02-02
DE3419059A1 (de) 1985-11-28
EP0183811B1 (de) 1988-12-28

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