JPS61502077A - Improved fiber optic remote sensor - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] Improved fiber optic remote sensor Background of the invention The present invention relates to the field of optical fiber communication and measurement devices that are excited and vibrated by light. This invention relates to a resonant element device.

Several definitions are necessary to clarify and facilitate understanding of the invention.

The "radiant energy" used in this device has a wavelength of 1000 wavelengths and 1 Q O, It contains both coherent and incoherent energy between 000 and includes infrared, ultraviolet, and visible light energy. Such radiant energy are modified to carry information and are called "stationary" or "stationary" to distinguish them from radiant energy signals. may also be called continuous wave J (CW). Widely used here for modulation, Then some characteristic of the carrier wave is changed so that the carrier wave changes in harmony with the instantaneous value of another signal. is intended to mean a process of modifying the characteristics, and in particular amplitude modulation. here "Steady" radiant energy, referred to as Radiation without short-term changes in intensity and with an essentially invariant spectral distribution Refers to energy. When referring to optical signals that carry information, the term "interception" is used. The words "cut off" and "thwarted" are modulated, and the multiplication table is also shown in a friendly manner. Also used to refer to ism. "Fluid" includes gas and/or liquid. for The term "silver plated" generally refers to a reflective metallic coating or its equivalent. cormorant. "Partially silver plated" is a coating that has both transmission and reflection properties, one of which is transparent and reflective. It is used to refer to something that has a high ratio to the other. The term "force" is used to move an object , or any physical parameter or current that can change its motion. In particular, it includes pressure and any parameter or phenomenon that can be converted into pressure.

"Motor" is used in its broadest sense, ie, refers to a device that moves an object.

The term "converter" refers to a device that converts energy from one form to another. , and herein the terms "optoelectric converter" and "electro-optical converter" more particularly , convert radiant energy into electrical energy, convert electrical energy into radiant energy Refers to a device useful for converting. ``Cantilever'' is used for mechanical or other sensors. This refers to the type of beam with a beam element attached to one end that can resonate. This way The eel cantilever element may be hollow, in which case it is considered a "resonant hollow beam" element or structure. Called. The benefits of using original fiber for communication and industrial process control are well known. As time progresses, the desired measurements are taken and the measurement information is transmitted through the optical fiber path for control and measurement. Returning the sensor to its fixed location via optical fiber is a simple and inexpensive method. There is increasing emphasis on various methods of reliable low-level radiant energy communication. ing. The many problems faced by designers of such process control systems A small number of low light level optical paths and the resulting light measurement information are to perform accurate and reliable measurements in such a way that they can be accurately communicated by means of There are requests for implementation methods.

It is well known that the resonant frequency of a tense Yuden wire is a function of the wire tension.

′! It has also been recognized that force-measuring devices can be based on this relationship, and U.S. Patent No. 4. As in No. 329,775, the electric wire is vibrated while being pulled by an unknown force. The dynamic frequency is being measured. Similarly, a pressure change occurs inside a vibrating hollow beam structure. It is also known that the resonant frequency changes in relation to this pressure change. It is. In the field of fiber optic technology, light between two aligned fiber optic elements is The vibrating element partially blocks the passage of the second optical fiber in a periodic manner. It is known to "block" light passing along a fiber element.

The stationary light beam is directed down the first optical fiber and modulated (e.g., acoustically). , and can return to a point adjacent to its source via a second source fiber. It is also known (U.S. Pat. Nos. 4,345,482 and 4,275.29) No. 5). a vibrating wire element by sending pulsating light through a first optical fiber; 1 whose vibration modifies the steady ray of light through a second optical fiber element. modulated light and reflect the modulated light along a sixth optical fiber element path. Very recently it has been claimed that the frequency of vibrations can be detected by child The modulation frequency of will then be measured. Changing the tension of a vibrating wire The original energy that returns changes regularly according to the tension of the wire [Jones, B. E. and G. Niss Philippe, “Refined optical fiber links for force measurement. September 1986] Jones and Philip's proposal is shown in Figure 2. With the device they suggested A thin electrical wire is strung between the anchor post and the pressure diaphragm. This wire is The two nodes of the wire are placed between the poles of the permanent magnet and connected to the host via a matching transformer. electrically connected to the diode 1. If light with alternating intensities passes through an optical fiber, goes to the photodiode, and when alternating current flows through the wire, the wire Fluctuations at a frequency equal to the frequency of intensity fluctuations in the plane defined by the current and magnetic field do. The motion of the wire is caused by two optical fibers placed parallel and adjacent in the plane of motion. Sensed by Iva.

The first of these two original fibers is connected to Ll (light emitting diode) in the control unit. (2) usually supplies light of constant intensity, and this light is filtered at the sensing head. Exit the fiber and irradiate the wire. Some light is reflected and enters the second fiber. Return to your unit. The intensity of this returning light is a function of the position of the wire relative to the fiber end. It is a number. Therefore, when the wire vibrates, the intensity of the alternating light that is in phase with the vibration is the second Return to control unit by fiber. This signal is electrically amplified by the control unit. A part of this electrical output resonates in phase with the wire and lights up the LED. A third optical fiber carries this in-phase optical signal to the sensing head. The original signal vibrates at that location! It is converted into vibration driving power for maintenance.

These and other methods of remote sensing and communication by conventional fiber optic means generally include independent vibrational energy sources for optical paths, complex circuits, and/or resonant components Requires.

Summary of the invention The present invention provides that a single stationary radiant energy beam is simultaneously generated by a vibrating or resonant element. Concerning the discovery that it can be blocked and reflected.

The present invention directs a steady radiant energy beam along a first transmission path to a vibratory resonant element. Radiant energy is directed to an adjacently located sensing transducer, thereby resonating the element. periodically at least partially directs the path of radiant energy striking its resonant element. If the path of the resonant element or the radiant energy is blocked, the steady radiant energy Some is reflected back in the opposite direction along the same transmission path, and the detected radiant energy The idea is to use the resonant element to maintain vibration. That is, , during periods when the resonant element is not blocking the radiant energy source, the energy is energy can reach the electrical energy converter, and the current sound is generated at the converter output. do.

The current is phased according to the well-known principle of initiating and maintaining the vibration of the resonant element. is shifted and used.

In the vibrating wire or lipo/type of vibrating part of the present invention, the phase shifted current is According to the laws of electromagnetism, the end of a wire or IJ element is suspended in a magnetic field and then tensioned. is applied to cause the wire or ribbon to start vibrating and to increase the resonant frequency of the wire or ribbon. Continue to vibrate with numbers. An alternative, °C resonant hollow beam type, provides a phase-shifted signal at the converter output. , is applied to the electro-mechanical energy converter to initiate and maintain vibration. Periodic The intensity of the radiant energy reflected by the resonant element changes in synchronization with the vibration frequency of the resonant element. do.

The detectable portion of the oscillatory reflected radiant energy is connected to the first stationary radiant energy path. including a device for deflecting the remote detector along a second path from the remote detector toward the remote detector; The frequency of the oscillatory radiant energy (and therefore the resonant element frequency) is lower than that of conventional equipment. It can be determined by Apply a force to a resonant element and change its frequency to the magnitude of the force If the force is varied in relation to the force, it becomes possible to measure the force remotely.

Of course, in converting a physical phenomenon or parameter into an applied force as described above, It is possible to measure various physical phenomena. Nine elongated lengths suitable for use as resonant elements Examples of members include taut wire or ribbon elements, double or single piece tuning forks, pels. - There are other cantilever structures and double cantilever devices.

Constant input into the fiber optic path to encode and transmit more information Radiant (or light) energy can be in any of a wide or specially restricted spectrum. Therefore, the light returning from the vibrating element may also be wide or specially restricted to nine spectra. It may also be possible to have a large amount of flexibility in transmitting information along a single path at least one pair of separate resonators located within a common confined space, each resonator The shaker is configured to measure different physical parameters. with two resonators With a single original fiber passage, steady energy is transferred to both vibrating resonators, Each reflected portion of light is then filtered and combined at a different wavelength. and return to the decoder along the same single optical fiber path. This filtering is similar to traditional filters. optical fire This can be done with multilayer coated reflective elements positioned to provide reflection along each path. Wear. The ``multilayer coating'' used here refers to a large number of dielectric materials with a specific refractive index. It is a coating made up of layers. Such coatings depend on the arrangement of these layers. Spectrally high-pass, band-pass, or low-pass degrees Celsius are also good, and these selections can be made using normal optical techniques. It is within the skill level of the caster. The decoder converts shorter wavelength energy into longer Use a beam splitter (or its equivalent m>) to separate the wavelength energy from I can be there. To display the sensed physical parameters, the vibration frequency is then Wave numbers can be measured. Many similar versatile configurations are available, and these The combination is limited only to °C depending on the different types of physical parameters to be measured; Only through the ability to distinguish and identify each radiant energy wavelength in that number limited. Some combination applications on a single fiber optic path according to the present invention include: , frequency and out-of-range indication, position and limit stops, local or remote temperature and pressure, pressure and/or other variables such as differential pressure and temperature, and in a particular configuration. This includes any other items required by the company.

Therefore, at one or more locations remote from where the signal is used or observed. physical phenomena such that the measured signal is sensitive to almost all normal environments. It is an advantage of the present invention to provide a measurement method that is immune or resistant to interference caused by The purpose is to

One advantage of the present invention is that it carries both the vibration source energy and the resonant vibration signal. A single fiber optic path can be used.

Another advantage of the present invention is that many types of physical parameters can be easily and accurately measured. It is possible.

Yet another advantage of the present invention is that multiple signal information energy and vibration source energy sources can be used together. - It has the ability to transport light to the 77479 path.

Another advantage of the present invention is that coded communications carried by optical fibers are Since it does not depend greatly on the energy level, even if there is wideband optical amplitude noise, the At least a good measurement can be made at a minimum suitable energy level.

Another advantage of the present invention is that there is effective overall isolation and no radio frequency interference (RF interference). That is.

Another benefit is the elimination of conductive paths in the sensor location and control space that create ground loop currents. It is to be.

Other advantages of the present invention include the electronics and The purpose of this is to significantly reduce the temperature concerns associated with electrical conductors that carry electrical conductors to and from control parts.

Another advantage of the nine inventions disclosed herein is the prevention of electrical explosions associated with electric current in hazardous environments. There is no danger of

Yet another advantage of the present invention is that there are no disturbances caused by lightning strikes.

An advantage of one embodiment of the disclosed invention is that it is suitable for either optical or electrical connections. It is very easy to adapt new technology to old control equipment and (or ) electrical and optical energy technologies 7 more and more in integrating or combining There is a certain aspect to it.

Yet another advantage of the present invention is that optical signals can be can be easily multiplexed.

Yet another advantage of the invention disclosed herein is that the mobile resonant element portion is reliably self-sustaining. It consists in the fact that it is self-initiated.

Yet another object of the present invention is to provide for operation under difficult environmental conditions, such as corrosive environments. It should be easy to adapt.

Another advantage of the present invention relates to its simple concept design feature, which would otherwise be expensive or complex. Inherently unreliable circuits can be replaced cheaply, easily, and reliably. can be done.

Yet another advantage of the present invention is that path losses (such as optical fiber bending losses) The measurement errors introduced by be.

Another particularly advantageous object of the invention is to provide remote measurement for initiating or maintaining vibrations. There is no need for a localized energy source at the location.

Other advantages of the present invention are that it is easy and economical to fabricate, calibrate, install, and use on a daily basis. It's a scale that makes you want to move.

Another advantage of the invention is that because it is optical, the on-site sensor has minimal electronic content. In other words, the sensor unit is made of silicon and does not require a constant amplification device. be.

Further objects and advantages of the invention will be apparent from the following detailed preferred and preferred embodiments taken together with the accompanying drawings. This is self-evident from the description of the alternative embodiments.

Brief description of the drawing The many features of the nine inventions disclosed herein are illustrated in the drawings which form part of them. This will become clear through consideration. Solid arrows indicate stationary or CW original energy The dotted arrows indicate the direction of the pulsating or modulated light, while the dotted arrows indicate the direction of the pulsating or modulated light. . Like reference symbols indicate corresponding parts in all the drawings.

Figure 1 is a simplified block diagram of the present invention, and Figure 2 is an approximation of the invention. A basic diagram showing the status 7 of the related work to be done, FIG. 3 is a simplified diagram of the basic resonant wire vibrator sensor part of the present invention; FIG. 4 is a simplified diagram of a basic resonant hollow beam transducer sensor embodiment of the present invention; FIG. 5 is a simplified diagram of a twin oscillator sensor according to an alternative embodiment of applicant's invention; Figure 6 shows the spectral distribution of a portion of the radiant energy that can be used in the present invention. shimafc shows two separate available bandwidth curves, FIG. 7 is a simplified diagram of the pressure receiver configuration of the present invention, and FIG. 8 is a simplified diagram of the pressure receiver configuration of the present invention. A simplified diagram of the pressure sensor configuration, FIG. 9 is a simplified original diagram of the temperature sensor according to the present invention, and FIG. 10 is a simplified diagram of the temperature sensor according to the present invention. Figure 11 shows the resonant hollow beam temperature sensor, and Figure 12 shows the cell configuration. 2 is a simplified illustration of an alternative embodiment of the invention in which an electrical switch is assembled with a sensor; FIG. united and united, Figure 1'5 is a simplified diagram of an embodiment in which optical or electrical drive can be used. tree, FIG. 14 shows the correct relationship between signals and feedback currents in a preferred embodiment of the invention. FIG. 4 is a timing diagram showing incorrect relationships.

DESCRIPTION OF THE PREFERRED EMBODIMENT Referring to the drawings, and in particular to FIG. 1Z, an improved multiplication fiber remote sensor device 10 is shown. This is a radiant energy source device yIL19, a constant (or CW) radiant energy 11, a beam deflection device [12, for example, a reverse beam deflection/spooler 13'2 including a bidirectional radiant energy path 14 and a deflected pulsating radiant energy path 15 , a force transducer 16, a transmission device 1T1 that conveys the force to the transducer device 120, and a signal detection A device 18 is included.

For purposes of this disclosure, the energy source device 19 is a steady source of radiant energy. Approximately 1.000X to 10G, 0005. coherence generated within the wavelength range of Contains non-coherent or non-coherent information. In this disclosure, the term "light" is used as specified above. The more general term ``radiant energy'' within the defined wavelength range can also be used to refer to good. This steady state energy is, for the purpose of this disclosure, modulated on and off. Steady or continuous wave (CW) to distinguish from pulsating, or blocked energy. ). In Figure 1, this CW energy is stationary radiant energy. - into the passageway 11, which passageway is a single fiber optic light guide or equivalent. good. The beam deflection device 12, which will be described later, is located remotely from the physical size measurement location. located along the passageway 11 at convenient control positions. Passage 11 is a guide for guiding light energy. The deflection device 12 enters the deflection device 12 in a first position and a bidirectional radiant energy path enters the deflection device [ The light energy is derived from the second position of 12. Again, passage 14 is a single light A fiber light guide or equivalent. Passage 14 is CW light energy Z1 resonance frequency into the transducer device 20, which includes several elements, which will be more fully described below. I will clarify. The force conversion device 16 efficiently converts the physical magnitude to be measured into mechanical force. , is added to the resonant frequency element of the transducer device 120. Many of the known techniques It is within the ability of the skilled engineer to select a force transducer from among the designs. It varies depending on the physical phenomenon to be measured. Briefly, sequential passages 11 and 1 The CW light that is received through the four channels is reflected as light and its intensity is measured in physics. the deflection device 12 along the path 14. The beam is placed inside the beam splitter 13 and passed to the reverse beam splitter 13. The beam splinter 13 is propagated to it from the first direction, it is passed through, and it is propagated from the opposite direction. Any known device for deflecting a portion of the light may be used. Deflected and variable The intense (or pulsating) light is directed along path 15 to signal detection device 18 . inspection The output sensor 18 is a light energy/electrical energy converter, and is a photodiode, light Can be any of several optical sensors containing electromotive force cells or elements, or their equivalents .

In operation, CW light is passed along a single sequential path 11° 14 to the transducer 20. The vibrator 20 is powered by CW light. A detailed description of this circuit can be found at The following description will be made with reference to FIGS. 6 and 4. related to the physical parameter to be sensed The force applied to the resonant element in the vibrator 20 by the force conversion and transmission device [16, 17] reflect a variable frequency pulsating light (related to force) along passageway 14 to a remote location. , at which point it is deflected and enters the detector 18 via the 12°13 optical path 15'. inspection The output device therefore produces an output signal related to the physical parameter to be measured.

Moving on to Figure 6, here is a transducer device that is part of the remote sensing device [the basic implementation of 2G]. A simplified original diagram of the example is shown. All necessary elements of the transducer device 20 are included. However, these are shown in schematic form to give an overview rather than specific details and configurations. It should be noted that what is being explained. This means that a person skilled in the art should be able to identify his or her own This is to enable the manufacture and use of the present invention in accordance with the requirements of the.

The vibrator device 20 includes a first end support structure 21, a resonant element 22, and an original fiber passage. Termination 23, radiant energy/electrical energy converter 24, insulator 25, transformer 2 6 or equivalent, phase shifting device [27, electrical connection device 128, second end support structure 2 9, magnetic field source devices 30, 31, and a frame 32.

A frame 32 is provided for assembly of the components and is rigidly constructed. Frame 32 Attached to the resonating element 22 is an end support structure vlJ21.29. This example In this case, a ribbon element is used as the resonant element 22. Alternatively, other shapes or External shapes may also be used, including wires, tapes, or beam structures, These require different physical configurations as described below. The resonant element 22 A reflective surface is included to "block" light t and reflect light 1 at the end. one end Part support structure? ! Reference numeral 129 denotes a ninth part that electrically isolates one end of the resonant element 22 from the frame 32. Insulator 25 is included. The optical path 14 is adjacent to the resonant element 22 and terminates at a termination point 7' ( . A radiant energy to electrical energy converter 24 is placed on the opposite side of the resonant element 22. , and is thereby partially blocked. The converter 24 is connected via a connecting wire 28 It is electrically connected to transformer 26 . The other winding of the transformer 26 is connected to a phase shifter 27. and its insulated ends to both ends of the resonant element 22 and the frame 32 and opposite support. The magnet 30.31 is connected parallel to the resonant element 22. and is equally displaced on both sides. To round off this example, magnet 30 is the north pole. Magnet 31 is the south pole, if you wish, you can follow the laws of electromagnetism χ correctly and reverse the magnetic field. It's okay. These are positioned to create a magnetic field perpendicular to the resonant element 22, and this The magnetic field is also perpendicular to the direction of current flow in the resonant element 22, which causes resonance. element 22 is sandwiched between a radiant energy source (termination point 23) and a transducer 24, and Move. In this configuration, the transformer 26, phase stabilizer 2T, connecting wire 28, and Generally speaking, the magnets 30, 31 are used as a device for generating the vibration sound of the resonant element 22. to be accomplished.

This mechanism is explained as follows. The radiant energy arriving at the termination point 23 is a photoelectric irradiating the air transducer 24 and generating a voltage drop, which is changed to a lower level by the transformer 26. It will be done. The phase shift circuit 27 shifts the phase angle of the starting current to adjust the vibration frequency of the element 22. remain above 0° and below 180° throughout the range (first (See also figure 4). The phase shift circuit 21 is formed with at least one of the following actances. The impedance associated with the signal is capacitive, inductive, and/or resistive.

A phase-shifted current is applied across the ribbon element 22 creating an electromagnetic field around the resonant element 22. Beggar occurs. Interaction of the electromagnetic field with the fixed magnetic field around the ribbon from magnet 30.31 Due to the temperature, the resonant element 22 moves within the magnetic field perpendicular to the beam from the termination point 23. Both The wave element blocks the passage of radiant energy between the termination point 23 and the opto-electrical converter 24. This movement reduces the current generated by the photocell and also causes the resonant element 22 to dissipate. When the radiant energy path is blocked, the radiant energy is equal to the arriving energy. It is reflected back along the source path. The resonant element 22 provides a sufficient radiant energy path. When interrupted, essentially stopping the generation of current, the resonant element will return to its resting position due to tension. Return to the radiant energy passageway? It is no longer blocked, and the same effect is repeated. The vibration will be maintained.

FIG. 4 shows a hollow cantilevered fiber optic remote sensor device 40, which is shown in the dotted box. includes an alternative embodiment of the transducer device 20 shown in FIG. This resonant cavity sensor is a stationary ( CW) radiant energy path 11, reverse beam deflection splitter 13, bidirectional radiant energy energy passage 14, deflected pulsating radiant energy passage 15, force transducer 164, Force conversion and transmission device 11, signal detection device 18, radiant energy source device 19, optical fiber bar path termination 23, radiant energy to electrical energy converter 24, electrical interconnection Device 28, interrupter 41, phase shift circuit 42, (hollow) resonant element 43, and vibrator device 44 included.

In this configuration, when the force transducer 16 is used to measure pressure, It is inherent in the resonant hollow beam element 43, and the pressure is caused by the force conversion and transmission device 1γ. When supplied, it stiffens the resonant hollow beam element 43 (thus changing its resonant frequency). ). The details of the configuration of the vibrator device 20 are slightly different from those shown in FIG. hollow The vibration of 943 is carried out by the vibrator device 44, and this , bimorph cell (two crystal elements tightly combined like Rochelle salt) and configured to act as a mechanical transducer), or equivalent. It is an electro-mechanical device. Vibrator? AC or pulsating electrical energy for driving exits the opto-electrical converter 24, which may be a photocell, photodiode, or Equivalents are fine. At the optical fiber path termination point 23 the radiant energy is transferred to the adjacent transducer 2 Directed to 4. interposed between the termination point 23 and the transducer 24, and at least partially What blocks the original passage between them is a hollow beam attached to the end of the resonant element 43. This is a mirror-like or reflective blocker 41. Correct phase for reliable vibration To maintain relationship 7, the output of converter 24 is connected to electrical interconnection device 28. It is sent to a conventional phase shift circuit 42 before being supplied to a vibrator 43 through an electric wire 2 . Transfer Phase circuit 42 includes at least one of the following impedances: capacitive, inductive, and/or resistive as required for phase angle shifting; This causes it to exceed 00° and less than 180° throughout the frequency range of element 43. It's still in its infancy.

The physical arrangement of the transducer elements 23.41.24, 43 and 44 has a CW radiant energy is directed from the termination point 23 onto the transducer 24 and an electrical signal is generated which is required. The phase is shifted depending on the point (see t above) and the signal is supplied to the oscillator device 44, which is used as an electric current. Air-mechanically causes the resonant hollow beam element 43Y to move from its stable position.

Attached to the end of the resonant element 43 is the resonant element 43 electro-mechanically biased. There is a blocker 41 disposed at the tth position that blocks the radiant energy passage when facing the direction. release During the interruption of radiant energy, the mirrored or reflective part of the interrupter absorbs radiant energy. It is reflected back along path 14. During this period of reduced drive power, the resonant element 4 3. Sufficient radiant energy is allowed to pass through the interrupter and the transducer drive effort is reduced. It returns toward its stable position until it hits the transducer again to generate sound.

Vibration is thus initiated and maintained at the natural resonant frequency of the resonant hollow beam element.

The change in pressure (Pl) introduced into the hollow beam cavity through the transmission device 11 Change the stiffness of the empty beam by 7, thereby changing the vibration frequency, see Figure 4. and input in the form of CW radiant energy from source device 19 to sequential passages 11 and 19. 14 to the termination point 23. The interrupter 41 has low radiant energy. and a portion of the beam is efficiently reflected along path 14 (as described above) to reverse beam deflection mirror 13. The reverse beam deflection mirror 13 includes a reflector to reflect the beam and return it. The generated pulsating radiant energy is transmitted through passage 15 to determine the frequency of oscillator 20. The signal is then redirected to the signal detector 18.

One embodiment of the present invention is simple in the manner illustrated by dual oscillator cell 50 in FIG. including the use of multiple signals on a single fiber optic path. Double oscillator center These elements, such as sensor 50, radiant energy path 11, reverse beam deflection mirror 13, first bidirectional radiant energy path 14. First deflected pulsating radiant energy path 15. Sensor beam splitter /combiner 51, second bidirectional radiant energy path 52, sixth bidirectional radiant energy energy passage 53, first sensor 54 and second sensor 55, detector beam splitter 56, second and fifth pulsating radiant energy passages 57 and 58, first and second Detector wavelength filters 59 and 60. first and second detectors 61 and 62 and their respective first and second output signals 63 and 64; sensor wavelength filters 65 and 66.

In the dual sensor unit of FIG. 5, the sensor splinter/combiner 51 is Two (or more) radiant energies at A) signals and these pass through separate output paths.゛　(Sensor splitter/connection output ports B and C of the splinter/combiner (also described in detail below) are separated from each other. Bidirectional passages 52 and 53 transmit radiant energy to sensor 54. and leads to 55. Each sensor 54, 55 has a separate wavelength filter 65, 66 in the optical fiber. Ivar is shown disposed between the end of the passageway 52,53 and a specular or reflective surface. It is. (An example of double wavelength filtering is shown in Figure 7 and discussed below in connection with Figure 7. Ru. )1 Instead of a separate filter, a mirrored or reflective area of the resonant element/interceptor reflective area by coating it with one or more extremely thin coatings with wavelength-specific sensitivity. What is the wavelength of the signal? May be limited. each separate filter element 65.66 (or coated mirror surfaces) are specific for different wavelengths, and the radiant energy returned GEE WAVETON LIMITED. The sensors 54 and 55 are similar to the vibrator 20 described above, but , filters 65 and 66 (or coated mirror surfaces) return waves of radiant energy. A specific (and different) wavelength is associated with each sensor 54.55. The only difference is that there is. The output 63.64 of each detector 61.62 is measured It has to do with physical size.

Beam splinter 51 splits one beam into two or more separate beams. represents an optical device for separating. An example of a simple beam splitter is: Includes: 1) A thin plate of light-transmitting glass that often bends and transmits a portion of the beam differently. 2) inserted into the beam at an angle to deflect it in the opposite direction; and 2) two straight In a square prism, their hypotenuse faces are glued together, and one of the two hypotenuse faces becomes a part. It may also be coated in a reflective manner. When the beam passes through this, the beam Some portion of the energy is determined by the position of the prism face and the direction of the detected light deflected at an angle.

receives energy from one thick optical fiber, and receives energy from one thick optical fiber. energy can be split into several thin fibers. The functions mentioned above known optical or radiant energy splinters and/or splinters equivalent to /coupler can be substituted, and the examples given here are not for illustration purposes. It is mentioned for purpose only.

Moving on to Figure 6, here is the space for the engineering R (infrared) LED (light emitting diode). The vector distribution curve 1o is shown, on which the radiant energy in the spectral output of the LKD The separate band response curves 71, 72 of two separate wavelengths of LE r- are superimposed. child The band curves 71 and 72 shown here are representative of the formation of multilayer radiant energy reflecting or transmitting coatings. It is a fruit. The use of a reflective coating is preferred as it makes the radiant energy more effective. stomach. In this case, curve 11. γ2 is as shown in Figure 5 59.60, 65.66 It is the radiant energy that has passed through the filter. In addition, selectivity (i.e. narrow (response curve) is obtained by providing a multilayer radiant energy reflecting mirror coating or element on the resonant element. This is accomplished by placing multiple sensor return signals on a single fiber optic path. can.

FIG. 7 shows an embodiment of the present invention for implementing the concept of a pressure sensor 80. is a bidirectional radiant energy passage 14, a force conversion transmission device 1T, and in this case a pipe or piping. a pressure transmitting device such as a resonant element 22, an optical fiber passage termination 23, a radiant energy ・Electrical energy converter 24, insulator 25, transformer 26, phase shifter 2γ, electrical Interconnect device 2B, end support structure 29, magnetic field source device (N pole) 30 and (S pole) 31, frame 32, reinforced and/or reinforced central part 83, diaphragm 81 , preload spring 82 , first chamber 84 , pressure chamber 85 , partition 86 , and boat 88 including.

In the embodiment of FIG. 7, the resonant element 22 includes an end support structure 29 and a diaphragm 8. The diaphragm 81 pressurizes the first chamber 84 with an electric wire or ribbon stretched between the The force chamber 85 is sealed. The center part 83 of the diaphragm 81 is equipped with a resonant element 22. The resonant element 22 is reinforced to keep the diaphragm away from the partition 86. is maintained under tension by a preload spring 82. The resonant element 22 is the optical path termination 23 and transducer 24 to at least partially block the passageway between the two. I'm so attached to it. The pressure P1 is transmitted to the pressure chamber 85 via the transmission device 11. It will be done. Magnets 30 and 31 create a magnetic field that causes resonant element 22 to become electrically When the resonant element 22 is energized within the ? perpendicular to both the direction of the flowing current and the magnetic field It moves back and forth between the pole faces of a permanent magnet in the same direction.

When configured in an actuation system, the diaphragm 81 of the pressure sensor 80 is subjected to a pressure P1 which affects the physical size to be measured. Pl is diaphragm 8 1, and its center 83 increases the tension on the resonant element 22 in proportion to the pressure P1. change and thus its resonant frequency changes in relation to the pressure Pl. Resonance required The energy is transmitted from a remote radiant energy source (not shown) via passage 14 to the end of passage 14. determined by the electrical signal derived from the radiant energy directed to the end point 23. It causes rocking or vibration at a frequency that can be used. Radiant energy (this is light energy When the waveform (・) hits the converter 24, the resonant element 22 passes through the transformer 26. receives an electrical signal which connects the resonant element 22 to the termination point 23 and the transducer 24. 7 (created by magnets 30.31) (under the influence of a magnetic field), interrupts with a regular speed of 1χ reaching the transducer 24, and its circumference The wavenumber depends on the tension applied to the resonant element 22 by the diaphragm 81. Both The vibration element 22 is a ribbon of metal having a reflective surface or equivalent. During the interruption, the light is reflected in a modulated manner to return the resonant frequency of the original source. and returns along the same path 14 through which it arrived and is detected as described above. Ru. External 7-88 is necessary when measuring gauge pressure, and also when measuring absolute pressure. When done, the unit is evacuated and the boat 88 is sealed.

The device of the invention can also measure temperature. This can be done in a variety of ways, and this The choice of method often depends on the application to which the temperature measurement is to be applied. for example, A gas-filled valve as described above with respect to FIG. 4 (e.g., 12 in FIG. 11) 1) is connected to the device and pressure changes are sensed as described above. same gas filling In order to sense the temperature, the pulping apparatus is operated to It may be used to pressurize yx. To confirm the accuracy of measurement, the temperature is at the resonant frequency It is often particularly convenient to know the degree to which a number is influenced.

Figure 8 shows a common such situation, where the pressure is measured remotely and the pressure Pressure sensors were used to confirm the presence and extent of temperature-induced changes in determining measurement accuracy. The temperature at the sensor location must be measured.

The temperature and pressure measurement in FIG. 8 is a dual sensor temperature compensated pressure sensor 90. This is achieved by the configuration, which includes a radiant energy source device 19, a constant (CW) radiant energy path 11, reverse beam deflection splitter 13, first bidirectional radiant energy energy path 14, first deflected pulsating radiant energy path 15, sensor beams Printer/coupler 51 (see explanation of Figure 5), a second bi-directional radiant energy transmitter. a third bidirectional radiant energy path 53; a detector beam slit 56; The second pulsating radiant energy passage 5γ, the sixth pulsating radiant energy passage 5B, the first a detector wavelength filter 59, a second detector wavelength filter 60, a first detector wavelength filter 65, second detector wavelength filter 66, pressure sensor 80 (description of FIG. ), temperature detector 93 and its output signal 91 (see Figure 8), pressure detector 94 and and its pressure output signal 92, and temperature sensor 100 (see explanation of FIG. 9). .

Temperature compensated pressure sensor 90 can be used for specific temperature and pressure sensors 100, 8G. C. is essentially the same as the dual resonant sensor 50 of FIG. Pressure cell/su8 0 was mentioned earlier, and the temperature sensor 100 (essentially the same as the vibrator device 20 described above) The same) is shown in FIG. 9 and explained below.

The physical parameters of the sensors 80 and 100 are shown as shown in FIG. Two separate signals are created, but this is because the energy is directed along a single signal path. A radiant energy source device (not shown) is used as the energy source. These two The signals, here the pressure and local temperature at the pressure sensor location, are different are created as two signals at different wavelengths and are detected separately so that they can be connected to the same single optical fiber. along the pressure path 14 and can be electronically correlated with the pressure signal. One temperature signal signal is used to reduce pressure signal errors due to temperature.

FIG. 9 schematically shows a simple temperature sensor 100, which depends on temperature as well as pressure. an enclosure containing one or more other sensors that measure the physical dimensions affected by the Particularly suitable for measuring ambient temperature inside a chamber. The elements involved are two-way radiation. Energy path 14, end support structure 21, resonant element 22, optical fiber path termination 23, radiant energy/electrical energy converter 24, transformer 26, phase shift device (resistance) resistor) 27, electrical interconnection device 28, magnetic field source devices 30 (N) and 31 (S), Frame 32, reflector 101, jumper l'02, and mounting base 103, electrical insulator 1 04, and an end support structure 105.

The resonant element 22 is placed under tension so that the first and second end support structures 21, 105 and electrically isolated by an insulator 104 at the end support 105. be done. By connecting the resonant element 22 to the end mount 103, the insulator 104 and This allows for fastening to the end support portion 105. The phase shifter 21 controls the amount of power drawn. Included to adjust the phase within the desired range (0° to 180°). flexibility electricity A gas conductor connects the insulated end of the resonant element 22 to the secondary winding of the transformer 26. .

The reflector element 101 is optionally provided, and the resonant element 22 has sufficient light reflectivity or It is provided to improve the reflectance of the resonant element 22 when greater light efficiency is required. It will be done. Resonant element 22 and frame (base or housing) of materials with different temperature coefficients By selecting a temperature of 32, it is possible to accurately measure the local temperature. Resonant element 22 itself remains a frequency independent of temperature. The multiple cells described above with respect to FIG. When using a sensor, it is necessary to limit the frequency response of the energy being returned and The mirror surface may be coated with one or more radiant energy frequency selective coatings. stomach. Other parts and elements are essentially the same as those in Figure 6 except for the differences mentioned above. Functions like the device (described above).

The improved fiber optic remote sensor is a load cell sensor 11 as shown in FIG. 0 configuration, including a bidirectional radiant energy path 14, Force conversion and transmission device 11, resonant element 22, optical fiber path termination 23, radiant energy - Electrical energy conversion path 24, electrical insulator 25, transformer 26, phase shift device 2γ, Electrical interconnection device 28, magnetic field device (N pole) 30 and (8 pole) 31.1m11 L Load cell housing 112, first end wall 113, second end wall 114, chamber 1 15, and an end mount 116.

In this configuration, the sensor is essentially the same as described above with respect to FIG. A force transducer device that operates, but the physical dimension that is sensed is the rim or lip 17 1T directly to the integral load cell housing 112 (and the end wall 1 13 is the pressure transmitted to the housing 112 as a whole). Ru. In this figure, load 111 is shown schematically as a mass acted upon by a force. be done. The rim or lip 1T of the load cell 110 is integral with the housing 112. It may be a separate part or a completely separate part. Its function is to reduce the force of the applied load. /) to the side wall of the housing 112 rather than to the end wall 113; would result in spurious or uncalibrated output readings.

The sensor measures the force exerted by a load in terms of frequency rather than absolute frequency measurements per se. Since it is measured as a change, the load cell can be placed in any posture or position. Accurately measure applied forces with little or no inconsistency related to their position or posture We should focus on what we can do.

FIG. 11 shows a fluid-filled pulp resonant cavity temperature sensor according to another embodiment of the present invention. 120 is a simplified schematic diagram of a sensor 120 that includes a bidirectional radiant energy path 14. , a force transmitting device 11 (partially shown in section), in this case a pressure transmitting device, an optical fiber Path termination 23, radiant energy to electrical energy converter 24, electrical interconnection system 28, reflective interrupter 41, phase shift circuit 42, resonant hollow beam element 43 (partially (shown in cross section), a transducer device 44, and a fluid-filled temperature-responsive container 121. It contains a temperature responsive fluid 122. traditional charged evaporation Air pressure technology can be used to avoid temperature effects on the filled fluid.

Operation in this configuration will be described with reference to FIG. essentially similar to those described above, but with specific force transducers, gas or fluid a fluid-filled temperature-responsive fluid container 12 that can contain a suitable temperature-responsive fluid 122; 1 is different. In this configuration, the force conversion and transmission device 11 has a hollow beam resonance component. It may be a tube or a capillary connected between the element 43 and the temperature-responsive fluid container 121; Container 121 may have any desired bulbous shape. The temperature change that affects container 121 is that The fluid contained in the fluid causes it to expand or contract. Expansion of fluid is caused by hollow beam resonance element 43 cavity and changes its resonant frequency.

The present invention has an optically supplied actuation energy w-ye and an optically sensed Although I explained that the electro-mechanical drive part of the vibrator will stop vibrating if the child desires it. It is clear that it can be blocked to stop it. Figure 12 is simplified This diagram shows some of the ways in which low-level electrical signals can be used to transmit electrical signals. A suitable implementation of the invention is shown, including a bidirectional radiant energy path 14. , end support structure 21, resonant element 22, optical fiber path termination 23, radiant energy - Electrical energy converter 24, transformer 26, phase stabilizer 21, electrical interconnection connection device 28, end support structure 29, switch 131, end mount 132, and It includes a rim 133.

End mount 132 and insulator 133 are attached to parts 25 and 87 (Figures 3 and 7). This is similar to what was previously explained regarding. Except for the switch 131, the remaining elements is similar to that explained in FIG. Switch 131 (sw,) is the feedback signal. can interrupt the electrical signal that is the signal, and in this way it will start the signal This is an excellent device for stopping or stopping the engine. sealed magnetic response reed switch As such, it becomes an ideal limit switch or other vibration isolator. multiple shielding two or more normally closed device switches 13 to provide a disconnection function; It is possible to connect one in series with one, or two in parallel with one. other places Additional switches placed at the It is useful for all applications. Instead, the electrical signal χ is used as shown in FIG. 5 and can be used for subsequent electrical communications, which is commonly This is a low level signal.

The embodiment of FIGS. 13 and 13 is essentially similar to that of FIG. 12, except that the embodiment of FIG. Tch (Sl) 131’! ! - removal and/or removal of the device's direct electrical and/or Electrical contacts 134, 135Y in Figure 16 to enable optical power supply/sensing. They differ in what they include. These electrical contacts are used for detection, local verification and/or calibration purposes. It can also be used for The same applies to the other embodiments of the invention described herein.

When used in electrical mode of operation, strap 1 between terminals 141 and 135 40 can be turned off to avoid loading by the transducer. Strap A switch may be used in place of the pull-up 140.

Finally, turning to Figure 14, two diagrams of wire position and drive current are shown, where the current The relative phase between is correct in Figure 14B and also shifted by 90° Figure 4A is incorrect). Stable operation is shown in Figure 14B. The drive current is , obtained only when the reflective part of the resonant element does not prevent the light from reaching the transducer. .

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Claims (38)

[Claims] 1. an optically driven, vibrating resonant element device, a) a stressed resonant element; b) a radiant energy source device that provides radiant energy; c) a radiant energy source device that provides the radiant energy; a single transmission path device providing a path in a first direction to a termination point adjacent to said resonant element; , d) capable of converting radiant energy into electrical energy and adjacent to said resonant element; on the opposite side from the termination point, the magnitude of the radiation energy emitted from the termination point; e) a converter device for generating a current derived from the electric current; connected, said resonance of said resonant element transversely between said transducer and said termination point; an electrical activation device for inducing motion at a frequency below the resonant frequency of the element; as well as f) said resonance intervening between said termination point and said conversion device during the movement of said resonant element; in conjunction with an element to transmit at least a portion of said radiant energy to at least one of said transmission paths. A reflection device for reflecting the light along a part thereof in a second direction opposite to the first direction. An optically driven, vibrating resonant element device consisting of: 2. The apparatus of claim 1, wherein said resonant element under stress is a rib. optically driven, vibrating resonant element device. 3. The device of claim 1, wherein the stressed resonant element is resonant. An optically driven, vibrating resonant element device that is a hollow beam structure. 4. The apparatus according to claim 3, wherein the resonant hollow beam structure is cantilevered. Optically driven, vibrating resonant element device. 5. The apparatus according to claim 1, wherein the radiant energy source apparatus provides The radiant energy is optically driven with a wavelength between 103 A and 105 Å, and the radiant energy is A moving resonant element device. 6. The apparatus according to claim 5, wherein said radiant energy source apparatus provides The radiant energy is preferably light having a wavelength between 1,000 Å and 4,000 Å. A mechanically driven, vibrating resonant element device. 7. The apparatus according to claim 5, wherein said radiant energy source apparatus provides The radiant energy is preferably light having a wavelength between 4,000 Å and 7,000 Å. A mechanically driven, vibrating resonant element device. 8. The apparatus according to claim 5, wherein the radiation e.g. given by the energy source device. The radiant energy emitted is an optical A resonant element device that is driven and vibrates. 9. The apparatus according to claim 1, wherein the radiant energy source apparatus provides The radiant energy generated by the optically driven, vibrating resonant element is incoherent. Device. 10. The device according to claim 1, wherein the radiant energy source device provides The radiant energy generated is coherent through an optically driven, vibrating resonant element. Device. 11. The apparatus of claim 1, wherein the transmission path device comprises a single optical fiber. An optically driven, vibrating resonant element device consisting of a radiant energy path. 12. 2. The apparatus of claim 1, wherein the transmission path is arranged in sequence along a single path. An optically driven, vibrating resonator consisting of a series of radiant energy passage elements, Element device. 13. The apparatus according to claim 1, wherein the radiant energy source apparatus provides The radiant energy generated is essentially constant, unmodulated, and optically driven; A vibrating resonant element device. 14. The device according to item 1 of the scope of demand, wherein the reflecting device is associated with the resonant element. and a separate reflective element arrangement, the reflective element configured to reduce the amount of radiant energy. at least a portion onto said transmission channel device in an opposite direction and in synchronism with said vibrating resonant element; The above radiant energy is reflected back at least partially to the termination point and the above converted an optically driven, vibrating resonant element device disposed between the devices; 15. The device according to claim 1, having at least a first and a second winding. further comprising a transformer impedance matching device, the transformer output current is connected to the first winding. and a resonant element activation device is optically coupled to said second winding. A driven and vibrating resonant element device. 16. The device according to claim 15, which does not cause a phase delay in the starting current. an optically driven and vibrating device further comprising a phase shifter for shifting between 0° and 180°; Resonant element device. 17. The apparatus of claim 1, wherein the electrical activation device comprises: a) a magnetic biasing device for creating a magnetic field around the resonant element; b) transmitting the electrical energy output of the transducer to each end of said resonant element; and a transmission device for passing the transducer output current through the resonant element to generate an electromagnetic field; Place, c) The interaction between the magnetic bias device and the electromagnetic field causes the conversion device and the radiation to An optical system consisting of a device for inducing the movement of the above-mentioned resonant element between the radiant energy termination points. A resonant element device that is driven by and vibrates. 18. The apparatus of claim 3, wherein the electrical activation device comprises: a) a piezoelectric vibrating device for converting electrical energy into mechanical movement of said resonant element; Beauty b) an optical device consisting of a device for transmitting the transducer electrical energy output to said piezoelectric vibrator; A resonant element device that is driven by and vibrates. 19. Stressed resonant elements, radiant energy drives, and stress-related In an optically driven vibrating resonant element device, including a device that returns a signal value that A method of sensing, a) connecting the source end of the radiant energy passage device to a steady beam of such radiant energy; b) directing said stationary radiant energy along said path in a first direction to a remote location; and c) alternately using said transmitted radiant energy. to intermittently drive the resonant element into a vibration mode and reduce the amount of radiated energy. At least a portion of the spider is partially reflected along said path in a second, opposite direction, where it is During the period when the radiated energy is not reflected, the electrical energy is Energy is extracted from and used to maintain the vibration of the resonant element. How to sense force. 20. 20. The method of claim 19, wherein the resonant element is essentially fixed. A method of sensing the forces that cause vibrations due to the interaction of electromagnetic fields within a magnetic field. 21. 20. The method of claim 19, wherein the resonant element directs an electric field to a piezoelectric element. Vibrations can be generated by directly applying mechanical stress to the resonant element. How to sense the force that causes . 22. 20. The method of claim 19, wherein the method comprises: The frequency of the pulse is related to the value of the stress applied to the resonant element above, and also displays the stress value. a step of detecting the reflected radiant energy to detect the reflected radiant energy; How to sense. 23. Stressed resonant elements, radiant energy drive sources, and an optically driven vibrating resonant element device including a device for returning a plurality of signal values; The method is a) a source end of a radiant energy path device containing at least a first and a second wavelength; exposed to a steady beam of radiant energy containing multiple wavelengths; b) directing said steady beam of radiant energy along said path in a first direction; the splitter splits the radiant energy into multiple separate paths. , c) transmitting radiant energy from at least one of said plurality of discrete paths to a remote resonance; transmit to the element device, and d) at least one resonant element using said transmitted radiant energy alternately; intermittently driven into a vibrational mode and selected from at least a portion of the radiant energy. transmitting the energy at the wavelengths at which where the radiant energy is reflected during a period in which the radiant energy is not reflected. Electrical energy is extracted from the energy and maintains the vibration of the resonant element. method used for. 24. 24. The method of claim 23, wherein the resonant element is an essentially fixed magnetic The way in which vibrations are produced by the interaction of electromagnetic fields within a field. 25. 24. The method of claim 23, wherein the resonant element directs an electric field to a piezoelectric element. Vibrations can be generated by applying mechanical stress directly to the resonant element. how it occurs. 26. 24. The method of claim 23, wherein the reflected radiant energy is a wave. method that is selectively deflected by the length and sensed to display stress values. 27. Sensing multiple stresses related to at least one physical parameter remotely an optically driven sensor for detecting a) a radiant energy source device providing radiant energy; b) at least one physical a plurality of vibrating coexistences under at least two stresses related to a physical parameter; a vibration element located far away from the radiant energy source device; c) a single transmission path serving as a path for transmitting radiant energy from the source device in a first direction; Device, d) a device for dividing said single transmission passage into a plurality of transmission passages; e) transmitting radiant energy along each of said transmission paths adjacent to each of said resonant elements; a plurality of transmission path devices for communicating to respective respective termination devices; f) associated with each passage and each termination point, adjacent to and of each of said resonant elements; Radiant energy emanating from each corresponding termination point opposite the corresponding termination point g) convert each resonant element into its corresponding radiated energy is induced by lateral motion between the transducer and each end point. individual electrical activation devices that interrupt access to the converter; h) directing at least a portion of the radiant energy along at least a portion of said transmission path; Modulate the radiant energy by reflecting it in a second direction opposite to the first direction. i) a reflective surface on each of said resonant elements for j) a device for selectively separating said radiant energy according to wavelength; detecting the modulation frequency of the returning radiant energy associated with each of the resonant elements; a device that is capable of relieving multiple stresses related to at least one physical parameter. Optically driven sensor for remote sensing. 28. 28. The apparatus of claim 27, wherein the radiant energy is selected by wavelength. The selective isolating device is designed to allow the radiant energy from each of the resonant elements to pass through. An optically driven sensor that is a wavelength-selective filter. 29. 28. The apparatus of claim 27, wherein the radiant energy is selected by wavelength. The selective isolating device selects a different wavelength on the reflective surface of each respective resonant element. Optically driven sensor with selective coating. 30. 3. A device according to claim 2 for sensing fluid pressure forces, comprising: The swing ribbon element includes first and second ends, and further includes: g) having at least one end wall in the enclosing enclosure and brackets perpendicular to said end wall; a housing device forming a rigid enclosure having at least one sidewall joined to the housing; h) a pressure diaphragm remote from said end wall, said diaphragm comprising: an attachment device attached to a first end of the resonant ribbon element and of the enclosure; defining first and second cavities therein, the first cavity being essentially sealed and the first cavity being essentially sealed; the end wall, the atmospheric ventilation hole, and at least a portion of the side wall; the shell is sealed from the first cavity; i) fluid pressure for transmitting pressure force to said second cavity and said diaphragm; a second end of the resonant ribbon element above the enclosure within the first cavity. It is characterized by being attached to the internal surface of the end wall, and This causes longitudinal tension on the resonant ribbon to be applied to the diaphragm. An optically driven, vibrating resonant element device that varies in relation to the force of pressure. 31. 31. The apparatus of claim 30 for measuring absolute pressure, comprising: The cavity is evacuated and sealed with an optically driven, vibrating resonant element system. Place. 32. An apparatus according to claim 30 for measuring gauge pressure, comprising: An apparatus wherein said first cavity is in communication with the atmosphere. 33. 3. The apparatus of claim 2 for sensing temperature, wherein the resonant ribbon a housing enclosure having opposing first and second ends to which opposite ends of the element are attached; further comprising: the housing enclosure structure having a different expansion than the ribbon element; An optically driven, vibrating resonant element device characterized by a temperature coefficient. 34. 2. A device according to claim 2 for sensing the force of mechanical pressure, wherein the resonant The bong element has first and second ends, and g) first and second end walls and a small wall perpendicular to said ends and surrounding a longitudinal axis therebetween; at least one adjacent side wall forming an enclosure with an internal surface; h) under tension; the first and second ends of said resonant ribbon element located inside said first and second end walls; a mounting device for securing to the i) interposed between said adjacent side wall and said mechanical pressure force, said mechanical pressure force; from the respective end walls and transmitting only the force of the mechanical pressure to the side walls. a spacer for transmitting the force coaxially with the vertical axis; an optically driven, vibrating resonant element device comprising: 35. 3. The device of claim 3, having an internal cavity and communicating with a fluid pressure force. It includes a resonant hollow beam structure for sensing the force of the fluid pressure by Furthermore, the pressure source and the internal cavity of the resonant hollow beam may be separated to generate the steam in equilibrium. an optically driven, vibrating resonant element device comprising: 36. The apparatus of claim 1, wherein said converter and said electrical activation device are connected to each other. the optically driven, vibrating resonant element further including a device for breaking the electrical connection between the Elementary equipment. 37. 2. The apparatus of claim 2, wherein the electrical connection to the electrical activation device is terminal devices for remote electrical communication and isolation of vibrating resonant element equipment. and an optically driven, vibrating resonant element device. 38. 38. The apparatus of claim 37, wherein said converter and said electrical activation device the optically driven, vibrating resonant element further including a device for breaking the electrical connection between the Elementary equipment.